JPS6178114A - Manufacture of laminated ceramic capacitor - Google Patents

Manufacture of laminated ceramic capacitor

Info

Publication number
JPS6178114A
JPS6178114A JP20022784A JP20022784A JPS6178114A JP S6178114 A JPS6178114 A JP S6178114A JP 20022784 A JP20022784 A JP 20022784A JP 20022784 A JP20022784 A JP 20022784A JP S6178114 A JPS6178114 A JP S6178114A
Authority
JP
Japan
Prior art keywords
powder
ceramic capacitor
printing
green sheet
photoreceptor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20022784A
Other languages
Japanese (ja)
Inventor
竹内 建二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP20022784A priority Critical patent/JPS6178114A/en
Publication of JPS6178114A publication Critical patent/JPS6178114A/en
Pending legal-status Critical Current

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  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 (技術分野ン 本発明は積層セラミックコンデンサの製造方法に関し、
特に内部電極の印刷方法に関する。
[Detailed Description of the Invention] (Technical Field) The present invention relates to a method for manufacturing a multilayer ceramic capacitor,
In particular, it relates to a method of printing internal electrodes.

(従来技術) 従来の積層セラミックコンデンサの内部電極の印刷方法
は第1rS!J(al 、 (b)に示すメツシュ状シ
ートを枠3へ張設したスクリーン2に内部電極と同一形
状の矩形パターンlを除いてマスキングした印刷スクリ
ーン4を使用して、第2図のとと(銀パラジウム等の導
1!性金Jla末とバインダーおよび溶剤の混合物から
なる低粘度の導電ペースト5をセラミックのグリーン7
−ト7上へスキージ6を用いて矩形パターンlを通過さ
せて内部[極の形状に押し出して印刷した後、第3図に
示す如く、ドライヤー8を用いて熱風乾燥固化して長期
の保存可能な内部電極のパターン25を形成する方法が
行なわれていた。しかしこのような従来方法ではセラミ
ックのグリーンシート7内に含有するバインダーが導通
ペースト5内の溶剤に俗解され易いため、グリーンシー
ト7の厚さが薄い場合には。
(Prior art) The conventional printing method for internal electrodes of multilayer ceramic capacitors is the 1st rS! The method shown in FIG. 2 is made by using a printing screen 4 that is masked except for the rectangular pattern l having the same shape as the internal electrode on the screen 2 in which the mesh-like sheet shown in J(al, (b)) is stretched over the frame 3. (A low viscosity conductive paste 5 consisting of a mixture of conductive gold JLA powder, binder and solvent such as silver palladium etc. is applied to ceramic green 7.
- Pass the rectangular pattern l onto the tray 7 using the squeegee 6, extrude it into a polar shape and print it, then dry it with hot air using the dryer 8 to solidify it for long-term storage, as shown in Figure 3. A method of forming a pattern 25 of internal electrodes has been used. However, in such a conventional method, the binder contained in the ceramic green sheet 7 is easily interpreted as the solvent in the conductive paste 5, so when the thickness of the green sheet 7 is thin.

グリーンシート7に変形が生ずることがあった。In some cases, the green sheet 7 was deformed.

このため、上述の従来印刷方法では積層セラミックコン
デンサの縛電体の厚さを薄型化させるlこは大きな障害
となる欠点があった。
For this reason, the above-described conventional printing method has the disadvantage that it becomes a major hindrance in reducing the thickness of the electrically binding body of a multilayer ceramic capacitor.

(発明の目的) 本発明の目的はこのような従来の欠点を除去した積層セ
ラミックコンデンサの製造方法を提供することにある。
(Objective of the Invention) An object of the present invention is to provide a method for manufacturing a multilayer ceramic capacitor that eliminates such conventional drawbacks.

(発明の構成) 本発明によれば銀、パラジウム寺の導電性金属粉末と熱
町m性樹脂と電荷制御剤とを溶解混線、固化、粉砕、整
粒の各工程を経て粉末にした後。
(Structure of the Invention) According to the present invention, conductive metal powder of silver or palladium, thermoplastic resin, and charge control agent are made into powder through the steps of melting, mixing, solidifying, pulverizing, and sizing.

この粉末を積層コンデンサの内部電極材料として静電印
刷法にてグリーンシート上へ印刷する工程を含むことを
%欲とした積層セラミックコンデンサの製造方法が得ら
れる。
A method for manufacturing a multilayer ceramic capacitor is obtained which includes a step of printing this powder onto a green sheet by electrostatic printing as an internal electrode material of the multilayer capacitor.

(!I!施例〉 以下、本発明の一実施例を第4図〜第10図を参照して
説明する。
(!I! Example> Hereinafter, an example of the present invention will be described with reference to FIGS. 4 to 10.

第4図は帯電工程を示し、銅板などの導1!注支持体1
3の上に硫化カドミウム(CaS)等の光導電材料かり
なる感光1412を破着形成し、さらにその上に絶縁層
11を積層して酸上面が形成された感光体10の上面を
コロナ放電発生器15を用いて一様に正または負の極性
に帯電する帯電処理工程を行なう。次に第5図、第6図
に示すような、非透光性の内部!極と同一形状のパター
ン21が透光性フィルム9上に形成された印刷スクリー
ン24を前述の帯電処理工程を経た感光体10の上面に
重ね、印刷スクリーン24の上方に配した紫外縁ランプ
などの元諒16から照元し、印刷スクリーン24を介し
て露光する露光工程を行う(第7図)。このとき感光体
10の線光部分は4を注を令゛シ、上面の電荷が減少す
るので、感′A、体10上には内部電極と同一形状のパ
ターン21と同形状の靜1ta像14が得られる。次に
第8図に示す如く箱状体19の上部開口部20iC感光
体10を靜電潜1#14を下にして嵌合し、感光体10
上の静電潜像14へ箱状体19の側面の透孔に嵌着して
配設したエアーノズル18にて次に説明する粉末17を
吹き付けて付着させ靜IL潜像14を現像する現像工程
を行なう。この粉末17は銀パラジウム等の導電性金属
粉末と熱可m性の樹脂および電荷制御剤が熱溶解混線・
冷却固化・粉砕・整粒の各工程を経て粉末となったもの
で、電荷制御剤にて、摩擦されると負または正の極性に
帯電するように形成される。感光体10の帯電電荷の極
性がこの粉末17の帯電極性と逆極性となるように帯電
させておけば、粉末17がノズル18から吹き出される
時、ノズル1Bとの摩擦環よび粉末17相互の摩憚で感
光体10上の帯電電荷と逆極性に帯電し、感光体10上
の静電潜像14へ電気的に付着形成することになる。次
に現像工程を経た感光体10の粉末付着面へグリーン7
−ト7を重ね、さらにコロナ放電発生器15にてグリー
ンシート7を粉末17と逆極性に帯電させて感光体10
上の粉末17をグリーン7−ト7へ転写する転写工程を
行なう(第9図)。次に転写工程を経たグリーンシート
7上の粉末17を上下一対の加熱ロール22と加圧ロー
ル23間にグリーンシート7を通過させ、熱加圧・融解
処理し、グリーンシート7へ固着する定着工程を行ない
長期の保存可能な内部電極のパターン25を形成する。
Figure 4 shows the charging process, and shows the conductor 1! of a copper plate, etc. Note Support 1
A photoreceptor 1412 made of a photoconductive material such as cadmium sulfide (CaS) is bonded and formed on top of the photoreceptor 1412, and an insulating layer 11 is further laminated thereon to generate a corona discharge on the upper surface of the photoreceptor 10 on which the acid upper surface is formed. A charging process is performed using the container 15 to uniformly charge the substrate to a positive or negative polarity. Next is the non-transparent interior as shown in Figures 5 and 6! A printing screen 24 on which a pattern 21 having the same shape as the pole is formed on a transparent film 9 is placed on the top surface of the photoreceptor 10 that has undergone the above-mentioned charging process, and an ultraviolet edge lamp or the like is placed above the printing screen 24. An exposure step is performed in which the light source is illuminated from the base 16 and exposed through the printing screen 24 (FIG. 7). At this time, the line light portion of the photoreceptor 10 has a pattern 21 having the same shape as the internal electrode, and a static image having the same shape as the pattern 21 having the same shape as the internal electrode. 14 is obtained. Next, as shown in FIG. 8, fit the photoreceptor 10 into the upper opening 20iC of the box-like body 19 with the Seidensen 1#14 facing down.
Development in which powder 17, which will be described below, is sprayed onto the upper electrostatic latent image 14 using an air nozzle 18 fitted into a through hole in the side surface of the box-shaped body 19 to adhere to the electrostatic latent image 14 above, and the silent IL latent image 14 is developed. Perform the process. This powder 17 is a mixture of conductive metal powder such as silver palladium, thermoplastic resin, and charge control agent.
It is made into a powder through the steps of cooling, solidifying, pulverizing, and sizing, and is formed so that it becomes negatively or positively charged when rubbed with a charge control agent. If the photoreceptor 10 is charged in such a way that the polarity of the charged charge is opposite to that of the powder 17, when the powder 17 is blown out from the nozzle 18, the friction ring with the nozzle 1B and the mutual contact between the powder 17 Due to abrasion, the electrostatic charge is charged to a polarity opposite to that on the photoreceptor 10, and is electrically attached to the electrostatic latent image 14 on the photoreceptor 10. Next, green 7 is applied to the powder adhesion surface of the photoreceptor 10 that has undergone the development process.
- The green sheet 7 is stacked on top of the green sheet 7, and then the green sheet 7 is charged with the opposite polarity to the powder 17 using a corona discharge generator 15, and the photoreceptor 10 is
A transfer step is performed to transfer the upper powder 17 onto the green plate 7 (FIG. 9). Next, the powder 17 on the green sheet 7 that has undergone the transfer process is passed through the green sheet 7 between a pair of upper and lower heating rolls 22 and pressure rolls 23, subjected to thermal pressure and melting treatment, and fixed to the green sheet 7 in a fixing process. This process forms an internal electrode pattern 25 that can be stored for a long time.

上記の帯電、露光、現像、転写、定着の各工程を経て内
部電極のパターン25が形成されたグリーンシート17
を公知の従来と同じ積層、プレス、切断、焼結の各工程
を経て積層セラミックコンテンサ素子を得る。
A green sheet 17 on which an internal electrode pattern 25 is formed through the above-mentioned charging, exposure, development, transfer, and fixing steps.
A laminated ceramic capacitor element is obtained through the known conventional steps of laminating, pressing, cutting, and sintering.

(発明の効果) 以上、本発明による内部電極の印刷方法は、溶剤を含ま
ない粉体をペーストとして使用するため印刷時のグリー
ンシートの変形が生じる恐れが無いので、薄膜化された
グリーンシートを用いた積層セラミックコンデンサを製
造することができる。
(Effects of the Invention) As described above, the method for printing internal electrodes according to the present invention uses a powder that does not contain a solvent as a paste, so there is no risk of deformation of the green sheet during printing. A multilayer ceramic capacitor using the above method can be manufactured.

したがってコンデンサ素子の小型化および大容量化に対
する効果は絶大のものがある。
Therefore, the effect of reducing the size and increasing the capacitance of the capacitor element is tremendous.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a) 、 (b)は従来例で用いる。印刷スフ
IJ −ンを示す正面図および側面図。第2図およびw
J3図は従来例の内部電極の印刷方法を示す側断面図。 第5図、第6図は本発明の実施例で用いる印刷スクリー
ンを示す正面図および側面図。It44図、第7図〜第
10図は本発明実施例の内部電極の印刷方法を示す側断
面図。 1.21・・・・・・内部電極と同一形状のパターン、
2・・・・・・スクリーン、3・・・・・・枠、4,2
4・・・・・・印刷スクリーン% 5・・・・・・導電
ペースト、6・・・・・・スキージ、7・・・・・・グ
リーンシート、8・・・・・・ドライヤー、9・・・・
・・透光性のフィルム、10・・・・・・感光体、11
・・・・・・絶縁層、12・・・・・・感光層、13・
・・・・・導電性支持体、14・・・・・・静電Iv像
、15・・・・・・コロナ放電発生器、16・・・・・
・光源、17・・・・・・粉末、18・・・・・・ノズ
ル、19・・・・・・箱状体、20・・・・・・箱状体
の上部開口部、22・・・・・・加熱ロール、23・・
・・・・加圧ロール。 25・・・・・・内部を極のパターン。 第2 図     第3図 第4 図       14 第7 凹 牛8図 −寸
FIGS. 1(a) and 1(b) are used in the conventional example. A front view and a side view showing a printing screen IJ-. Figure 2 and w
Figure J3 is a side cross-sectional view showing a conventional internal electrode printing method. 5 and 6 are a front view and a side view showing a printing screen used in an embodiment of the present invention. It44 and FIGS. 7 to 10 are side sectional views showing a method of printing internal electrodes according to an embodiment of the present invention. 1.21... Pattern with the same shape as the internal electrode,
2...Screen, 3...Frame, 4,2
4... Printing screen% 5... Conductive paste, 6... Squeegee, 7... Green sheet, 8... Dryer, 9... ...
...Translucent film, 10...Photoreceptor, 11
...Insulating layer, 12... Photosensitive layer, 13.
... Conductive support, 14 ... Electrostatic IV image, 15 ... Corona discharge generator, 16 ...
- Light source, 17... Powder, 18... Nozzle, 19... Box-shaped body, 20... Upper opening of box-shaped body, 22...・・・Heating roll, 23...
...Pressure roll. 25...Polar pattern inside. Fig. 2 Fig. 3 Fig. 4 Fig. 14 Fig. 7 Concave cow Fig. 8 - Dimensions

Claims (1)

【特許請求の範囲】[Claims] 導電性金属粉末可塑性の樹脂と電荷制御剤とを粉末にし
た後、前記粉末を積層コンデンサの内部電極材料として
静電印刷法でグリーンシート上へ印刷する工程を含むこ
とを特徴とする積層セラミックコンデンサの製造方法。
A multilayer ceramic capacitor comprising the step of powdering a conductive metal powder plastic resin and a charge control agent, and then printing the powder onto a green sheet by electrostatic printing as an internal electrode material of the multilayer capacitor. manufacturing method.
JP20022784A 1984-09-25 1984-09-25 Manufacture of laminated ceramic capacitor Pending JPS6178114A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20022784A JPS6178114A (en) 1984-09-25 1984-09-25 Manufacture of laminated ceramic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20022784A JPS6178114A (en) 1984-09-25 1984-09-25 Manufacture of laminated ceramic capacitor

Publications (1)

Publication Number Publication Date
JPS6178114A true JPS6178114A (en) 1986-04-21

Family

ID=16420922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20022784A Pending JPS6178114A (en) 1984-09-25 1984-09-25 Manufacture of laminated ceramic capacitor

Country Status (1)

Country Link
JP (1) JPS6178114A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110620A (en) * 1986-10-28 1988-05-16 日本電気株式会社 Method of forming electrode on ceramic green sheet
JP2010062520A (en) * 2008-08-08 2010-03-18 Murata Mfg Co Ltd Manufacturing apparatus and manufacturing method of multi-layer ceramic electronic component
JP2012231112A (en) * 2011-04-26 2012-11-22 Samsung Electro-Mechanics Co Ltd Multilayer thin film for ceramic electronic component and manufacturing method for the film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110620A (en) * 1986-10-28 1988-05-16 日本電気株式会社 Method of forming electrode on ceramic green sheet
JP2010062520A (en) * 2008-08-08 2010-03-18 Murata Mfg Co Ltd Manufacturing apparatus and manufacturing method of multi-layer ceramic electronic component
JP2012231112A (en) * 2011-04-26 2012-11-22 Samsung Electro-Mechanics Co Ltd Multilayer thin film for ceramic electronic component and manufacturing method for the film

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