JPS63110027U - - Google Patents

Info

Publication number
JPS63110027U
JPS63110027U JP199287U JP199287U JPS63110027U JP S63110027 U JPS63110027 U JP S63110027U JP 199287 U JP199287 U JP 199287U JP 199287 U JP199287 U JP 199287U JP S63110027 U JPS63110027 U JP S63110027U
Authority
JP
Japan
Prior art keywords
wafer
susceptor
size
crystal growth
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP199287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP199287U priority Critical patent/JPS63110027U/ja
Publication of JPS63110027U publication Critical patent/JPS63110027U/ja
Pending legal-status Critical Current

Links

JP199287U 1987-01-09 1987-01-09 Pending JPS63110027U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP199287U JPS63110027U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP199287U JPS63110027U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Publications (1)

Publication Number Publication Date
JPS63110027U true JPS63110027U (enrdf_load_stackoverflow) 1988-07-15

Family

ID=30780414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP199287U Pending JPS63110027U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Country Status (1)

Country Link
JP (1) JPS63110027U (enrdf_load_stackoverflow)

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