JPH03128660U - - Google Patents

Info

Publication number
JPH03128660U
JPH03128660U JP3846090U JP3846090U JPH03128660U JP H03128660 U JPH03128660 U JP H03128660U JP 3846090 U JP3846090 U JP 3846090U JP 3846090 U JP3846090 U JP 3846090U JP H03128660 U JPH03128660 U JP H03128660U
Authority
JP
Japan
Prior art keywords
quartz plate
electrode
stepped portion
fastener
counter electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3846090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3846090U priority Critical patent/JPH03128660U/ja
Publication of JPH03128660U publication Critical patent/JPH03128660U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP3846090U 1990-04-10 1990-04-10 Pending JPH03128660U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3846090U JPH03128660U (enrdf_load_stackoverflow) 1990-04-10 1990-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3846090U JPH03128660U (enrdf_load_stackoverflow) 1990-04-10 1990-04-10

Publications (1)

Publication Number Publication Date
JPH03128660U true JPH03128660U (enrdf_load_stackoverflow) 1991-12-25

Family

ID=31546488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3846090U Pending JPH03128660U (enrdf_load_stackoverflow) 1990-04-10 1990-04-10

Country Status (1)

Country Link
JP (1) JPH03128660U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11194016A (ja) * 1998-01-05 1999-07-21 Nikon Corp 表面形状測定方法
JP2011159638A (ja) * 2011-05-18 2011-08-18 Shimadzu Corp プラズマ処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11194016A (ja) * 1998-01-05 1999-07-21 Nikon Corp 表面形状測定方法
JP2011159638A (ja) * 2011-05-18 2011-08-18 Shimadzu Corp プラズマ処理装置

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