JPS63110028U - - Google Patents

Info

Publication number
JPS63110028U
JPS63110028U JP199387U JP199387U JPS63110028U JP S63110028 U JPS63110028 U JP S63110028U JP 199387 U JP199387 U JP 199387U JP 199387 U JP199387 U JP 199387U JP S63110028 U JPS63110028 U JP S63110028U
Authority
JP
Japan
Prior art keywords
susceptor
wafer
installation recess
guide cavity
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP199387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP199387U priority Critical patent/JPS63110028U/ja
Publication of JPS63110028U publication Critical patent/JPS63110028U/ja
Pending legal-status Critical Current

Links

JP199387U 1987-01-09 1987-01-09 Pending JPS63110028U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP199387U JPS63110028U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP199387U JPS63110028U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Publications (1)

Publication Number Publication Date
JPS63110028U true JPS63110028U (enrdf_load_stackoverflow) 1988-07-15

Family

ID=30780416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP199387U Pending JPS63110028U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Country Status (1)

Country Link
JP (1) JPS63110028U (enrdf_load_stackoverflow)

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