JPS6310801B2 - - Google Patents

Info

Publication number
JPS6310801B2
JPS6310801B2 JP57066585A JP6658582A JPS6310801B2 JP S6310801 B2 JPS6310801 B2 JP S6310801B2 JP 57066585 A JP57066585 A JP 57066585A JP 6658582 A JP6658582 A JP 6658582A JP S6310801 B2 JPS6310801 B2 JP S6310801B2
Authority
JP
Japan
Prior art keywords
diffraction grating
exposure
angle
transparent body
sin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57066585A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58182604A (ja
Inventor
Yoshikazu Nishiwaki
Haruji Matsuoka
Kenji Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP57066585A priority Critical patent/JPS58182604A/ja
Priority to CA000425909A priority patent/CA1211868A/en
Priority to DE8383302132T priority patent/DE3381755D1/de
Priority to EP88111594A priority patent/EP0303836A1/en
Priority to EP83302132A priority patent/EP0092395B1/en
Priority to US06/486,171 priority patent/US4560249A/en
Publication of JPS58182604A publication Critical patent/JPS58182604A/ja
Priority to US06/786,028 priority patent/US4673241A/en
Priority to CA000496892A priority patent/CA1227678A/en
Publication of JPS6310801B2 publication Critical patent/JPS6310801B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Spectrometry And Color Measurement (AREA)
JP57066585A 1982-04-16 1982-04-20 回折格子作製法 Granted JPS58182604A (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP57066585A JPS58182604A (ja) 1982-04-20 1982-04-20 回折格子作製法
CA000425909A CA1211868A (en) 1982-04-16 1983-04-14 Method of forming diffraction gratings and optical branching filter elements produced thereby
DE8383302132T DE3381755D1 (de) 1982-04-16 1983-04-15 Verfahren zur herstellung von diffraktionsgittern.
EP88111594A EP0303836A1 (en) 1982-04-16 1983-04-15 Optical branching filter element
EP83302132A EP0092395B1 (en) 1982-04-16 1983-04-15 Method of forming diffraction gratings
US06/486,171 US4560249A (en) 1982-04-16 1983-04-18 Method of forming diffraction gratings and optical branching filter elements produced thereby
US06/786,028 US4673241A (en) 1982-04-16 1985-10-10 Diffraction gratings and optical branching filter elements
CA000496892A CA1227678A (en) 1982-04-16 1985-12-04 Optical branching filter elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57066585A JPS58182604A (ja) 1982-04-20 1982-04-20 回折格子作製法

Publications (2)

Publication Number Publication Date
JPS58182604A JPS58182604A (ja) 1983-10-25
JPS6310801B2 true JPS6310801B2 (enrdf_load_stackoverflow) 1988-03-09

Family

ID=13320166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57066585A Granted JPS58182604A (ja) 1982-04-16 1982-04-20 回折格子作製法

Country Status (1)

Country Link
JP (1) JPS58182604A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01144832U (enrdf_load_stackoverflow) * 1988-03-29 1989-10-04
JP2599455B2 (ja) * 1989-02-20 1997-04-09 松下電器産業株式会社 回析格子およびその製造方法

Also Published As

Publication number Publication date
JPS58182604A (ja) 1983-10-25

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