JPS63106766U - - Google Patents
Info
- Publication number
- JPS63106766U JPS63106766U JP19994886U JP19994886U JPS63106766U JP S63106766 U JPS63106766 U JP S63106766U JP 19994886 U JP19994886 U JP 19994886U JP 19994886 U JP19994886 U JP 19994886U JP S63106766 U JPS63106766 U JP S63106766U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- utility
- scope
- registration request
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19994886U JPS63106766U (de) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19994886U JPS63106766U (de) | 1986-12-26 | 1986-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106766U true JPS63106766U (de) | 1988-07-09 |
Family
ID=31162048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19994886U Pending JPS63106766U (de) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106766U (de) |
-
1986
- 1986-12-26 JP JP19994886U patent/JPS63106766U/ja active Pending