JPH038426U - - Google Patents
Info
- Publication number
- JPH038426U JPH038426U JP6771689U JP6771689U JPH038426U JP H038426 U JPH038426 U JP H038426U JP 6771689 U JP6771689 U JP 6771689U JP 6771689 U JP6771689 U JP 6771689U JP H038426 U JPH038426 U JP H038426U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- reaction
- heater
- defining
- curved surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989067716U JP2541813Y2 (ja) | 1989-06-09 | 1989-06-09 | 縦型cvd装置の反応管 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989067716U JP2541813Y2 (ja) | 1989-06-09 | 1989-06-09 | 縦型cvd装置の反応管 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH038426U true JPH038426U (de) | 1991-01-28 |
JP2541813Y2 JP2541813Y2 (ja) | 1997-07-23 |
Family
ID=31601535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989067716U Expired - Lifetime JP2541813Y2 (ja) | 1989-06-09 | 1989-06-09 | 縦型cvd装置の反応管 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2541813Y2 (de) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201927U (de) * | 1986-06-13 | 1987-12-23 |
-
1989
- 1989-06-09 JP JP1989067716U patent/JP2541813Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201927U (de) * | 1986-06-13 | 1987-12-23 |
Also Published As
Publication number | Publication date |
---|---|
JP2541813Y2 (ja) | 1997-07-23 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |