JPS63102221A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS63102221A
JPS63102221A JP61247530A JP24753086A JPS63102221A JP S63102221 A JPS63102221 A JP S63102221A JP 61247530 A JP61247530 A JP 61247530A JP 24753086 A JP24753086 A JP 24753086A JP S63102221 A JPS63102221 A JP S63102221A
Authority
JP
Japan
Prior art keywords
single crystal
island
polycrystalline silicon
reflection film
optical reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61247530A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410214B2 (enExample
Inventor
Genichi Yamazaki
山崎　弦一
Shigenobu Akiyama
秋山　重信
Yasuaki Terui
照井　康明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61247530A priority Critical patent/JPS63102221A/ja
Publication of JPS63102221A publication Critical patent/JPS63102221A/ja
Publication of JPH0410214B2 publication Critical patent/JPH0410214B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
JP61247530A 1986-10-20 1986-10-20 半導体装置の製造方法 Granted JPS63102221A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61247530A JPS63102221A (ja) 1986-10-20 1986-10-20 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61247530A JPS63102221A (ja) 1986-10-20 1986-10-20 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS63102221A true JPS63102221A (ja) 1988-05-07
JPH0410214B2 JPH0410214B2 (enExample) 1992-02-24

Family

ID=17164867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61247530A Granted JPS63102221A (ja) 1986-10-20 1986-10-20 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS63102221A (enExample)

Also Published As

Publication number Publication date
JPH0410214B2 (enExample) 1992-02-24

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Legal Events

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