JPS63100156A - 蒸着用Ｆｅ−Ｓｉ−Ａｌ基合金 - Google Patents
蒸着用Ｆｅ−Ｓｉ−Ａｌ基合金Info
- Publication number
- JPS63100156A JPS63100156A JP61243630A JP24363086A JPS63100156A JP S63100156 A JPS63100156 A JP S63100156A JP 61243630 A JP61243630 A JP 61243630A JP 24363086 A JP24363086 A JP 24363086A JP S63100156 A JPS63100156 A JP S63100156A
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- alloy
- thin film
- present
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000956 alloy Substances 0.000 title claims abstract description 55
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 53
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 34
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 16
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 15
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 14
- 229910002796 Si–Al Inorganic materials 0.000 claims description 5
- 230000005291 magnetic effect Effects 0.000 abstract description 33
- 239000010409 thin film Substances 0.000 abstract description 27
- 239000000463 material Substances 0.000 abstract description 17
- 230000035699 permeability Effects 0.000 abstract description 15
- 229910052791 calcium Inorganic materials 0.000 abstract description 14
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000000203 mixture Substances 0.000 abstract description 7
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 5
- 229910052760 oxygen Inorganic materials 0.000 abstract description 5
- 238000005247 gettering Methods 0.000 abstract 1
- 239000000292 calcium oxide Substances 0.000 description 21
- 235000012255 calcium oxide Nutrition 0.000 description 21
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 20
- 239000002184 metal Substances 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 16
- 230000000694 effects Effects 0.000 description 15
- 238000004544 sputter deposition Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 239000011819 refractory material Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 229910001004 magnetic alloy Inorganic materials 0.000 description 3
- 230000005389 magnetism Effects 0.000 description 3
- 239000006104 solid solution Substances 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000005275 alloying Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 229910000702 sendust Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910017082 Fe-Si Inorganic materials 0.000 description 1
- 229910017133 Fe—Si Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- JHLNERQLKQQLRZ-UHFFFAOYSA-N calcium silicate Chemical compound [Ca+2].[Ca+2].[O-][Si]([O-])([O-])[O-] JHLNERQLKQQLRZ-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 229910000514 dolomite Inorganic materials 0.000 description 1
- 239000010459 dolomite Substances 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- JFUIHGAGFMFNRD-UHFFFAOYSA-N fica Chemical compound FC1=CC=C2NC(C(=O)NCCS)=CC2=C1 JFUIHGAGFMFNRD-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000001603 reducing effect Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Soft Magnetic Materials (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61243630A JPS63100156A (ja) | 1986-10-14 | 1986-10-14 | 蒸着用Ｆｅ−Ｓｉ−Ａｌ基合金 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61243630A JPS63100156A (ja) | 1986-10-14 | 1986-10-14 | 蒸着用Ｆｅ−Ｓｉ−Ａｌ基合金 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63100156A true JPS63100156A (ja) | 1988-05-02 |
| JPH0475309B2 JPH0475309B2 (enExample) | 1992-11-30 |
Family
ID=17106679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61243630A Granted JPS63100156A (ja) | 1986-10-14 | 1986-10-14 | 蒸着用Ｆｅ−Ｓｉ−Ａｌ基合金 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63100156A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5073214A (en) * | 1988-10-26 | 1991-12-17 | Matsushita Electric Industrial Co., Ltd. | Magnetic material for a magnetic head |
| WO2002079093A1 (en) * | 2001-03-30 | 2002-10-10 | Hatsuichi Matsumoto | Artificial ore and coating material or refractory block containing the artificial ore |
-
1986
- 1986-10-14 JP JP61243630A patent/JPS63100156A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5073214A (en) * | 1988-10-26 | 1991-12-17 | Matsushita Electric Industrial Co., Ltd. | Magnetic material for a magnetic head |
| WO2002079093A1 (en) * | 2001-03-30 | 2002-10-10 | Hatsuichi Matsumoto | Artificial ore and coating material or refractory block containing the artificial ore |
| US7112548B2 (en) | 2001-03-30 | 2006-09-26 | Hatsuichi Matsumoto | Artificial ore and coating material or refractory block containing the artificial ore |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0475309B2 (enExample) | 1992-11-30 |
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