JPS6298550A - 放電型イオン源 - Google Patents

放電型イオン源

Info

Publication number
JPS6298550A
JPS6298550A JP60238889A JP23888985A JPS6298550A JP S6298550 A JPS6298550 A JP S6298550A JP 60238889 A JP60238889 A JP 60238889A JP 23888985 A JP23888985 A JP 23888985A JP S6298550 A JPS6298550 A JP S6298550A
Authority
JP
Japan
Prior art keywords
voltage
nozzle
chamber
interface probe
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60238889A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0450701B2 (enrdf_load_stackoverflow
Inventor
Tokuo Mizuno
水野　悳夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP60238889A priority Critical patent/JPS6298550A/ja
Publication of JPS6298550A publication Critical patent/JPS6298550A/ja
Publication of JPH0450701B2 publication Critical patent/JPH0450701B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP60238889A 1985-10-25 1985-10-25 放電型イオン源 Granted JPS6298550A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60238889A JPS6298550A (ja) 1985-10-25 1985-10-25 放電型イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60238889A JPS6298550A (ja) 1985-10-25 1985-10-25 放電型イオン源

Publications (2)

Publication Number Publication Date
JPS6298550A true JPS6298550A (ja) 1987-05-08
JPH0450701B2 JPH0450701B2 (enrdf_load_stackoverflow) 1992-08-17

Family

ID=17036772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60238889A Granted JPS6298550A (ja) 1985-10-25 1985-10-25 放電型イオン源

Country Status (1)

Country Link
JP (1) JPS6298550A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6372056A (ja) * 1986-07-11 1988-04-01 マイクロマス　リミテッド 放電イオン化質量分析計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6372056A (ja) * 1986-07-11 1988-04-01 マイクロマス　リミテッド 放電イオン化質量分析計

Also Published As

Publication number Publication date
JPH0450701B2 (enrdf_load_stackoverflow) 1992-08-17

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