JPS6297686A - 超純水製造システム - Google Patents

超純水製造システム

Info

Publication number
JPS6297686A
JPS6297686A JP60237404A JP23740485A JPS6297686A JP S6297686 A JPS6297686 A JP S6297686A JP 60237404 A JP60237404 A JP 60237404A JP 23740485 A JP23740485 A JP 23740485A JP S6297686 A JPS6297686 A JP S6297686A
Authority
JP
Japan
Prior art keywords
ultrapure water
piping
pure water
primary pure
production system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60237404A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0116556B2 (enExample
Inventor
Michihiko Asai
道彦 浅井
Tsukasa Sakai
坂井　士
Keishiro Tsuda
津田　圭四郎
Kazunari Takemoto
一成 竹元
Makoto Kito
鬼頭　諒
Minoru Kuroiwa
稔 黒岩
Takashi Komatsu
小松　敬志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Hitachi Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP60237404A priority Critical patent/JPS6297686A/ja
Publication of JPS6297686A publication Critical patent/JPS6297686A/ja
Publication of JPH0116556B2 publication Critical patent/JPH0116556B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Physical Water Treatments (AREA)
JP60237404A 1985-10-25 1985-10-25 超純水製造システム Granted JPS6297686A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60237404A JPS6297686A (ja) 1985-10-25 1985-10-25 超純水製造システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60237404A JPS6297686A (ja) 1985-10-25 1985-10-25 超純水製造システム

Publications (2)

Publication Number Publication Date
JPS6297686A true JPS6297686A (ja) 1987-05-07
JPH0116556B2 JPH0116556B2 (enExample) 1989-03-24

Family

ID=17014886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60237404A Granted JPS6297686A (ja) 1985-10-25 1985-10-25 超純水製造システム

Country Status (1)

Country Link
JP (1) JPS6297686A (enExample)

Also Published As

Publication number Publication date
JPH0116556B2 (enExample) 1989-03-24

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