JPS6296842U - - Google Patents

Info

Publication number
JPS6296842U
JPS6296842U JP18718985U JP18718985U JPS6296842U JP S6296842 U JPS6296842 U JP S6296842U JP 18718985 U JP18718985 U JP 18718985U JP 18718985 U JP18718985 U JP 18718985U JP S6296842 U JPS6296842 U JP S6296842U
Authority
JP
Japan
Prior art keywords
electron beam
rectangular aperture
size
image
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18718985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18718985U priority Critical patent/JPS6296842U/ja
Publication of JPS6296842U publication Critical patent/JPS6296842U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP18718985U 1985-12-06 1985-12-06 Pending JPS6296842U (US07714131-20100511-C00038.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18718985U JPS6296842U (US07714131-20100511-C00038.png) 1985-12-06 1985-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18718985U JPS6296842U (US07714131-20100511-C00038.png) 1985-12-06 1985-12-06

Publications (1)

Publication Number Publication Date
JPS6296842U true JPS6296842U (US07714131-20100511-C00038.png) 1987-06-20

Family

ID=31137436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18718985U Pending JPS6296842U (US07714131-20100511-C00038.png) 1985-12-06 1985-12-06

Country Status (1)

Country Link
JP (1) JPS6296842U (US07714131-20100511-C00038.png)

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