JPS6294653U - - Google Patents
Info
- Publication number
- JPS6294653U JPS6294653U JP18780885U JP18780885U JPS6294653U JP S6294653 U JPS6294653 U JP S6294653U JP 18780885 U JP18780885 U JP 18780885U JP 18780885 U JP18780885 U JP 18780885U JP S6294653 U JPS6294653 U JP S6294653U
- Authority
- JP
- Japan
- Prior art keywords
- silicon layer
- doped silicon
- electrode metals
- source
- drain electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 229910021332 silicide Inorganic materials 0.000 claims description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18780885U JPS6294653U (enExample) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18780885U JPS6294653U (enExample) | 1985-12-04 | 1985-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6294653U true JPS6294653U (enExample) | 1987-06-17 |
Family
ID=31138608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18780885U Pending JPS6294653U (enExample) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6294653U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59168672A (ja) * | 1983-03-15 | 1984-09-22 | Canon Inc | 半導体装置 |
-
1985
- 1985-12-04 JP JP18780885U patent/JPS6294653U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59168672A (ja) * | 1983-03-15 | 1984-09-22 | Canon Inc | 半導体装置 |
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