JPS6293937A - マイクロ波プラズマ処理装置 - Google Patents

マイクロ波プラズマ処理装置

Info

Publication number
JPS6293937A
JPS6293937A JP23320585A JP23320585A JPS6293937A JP S6293937 A JPS6293937 A JP S6293937A JP 23320585 A JP23320585 A JP 23320585A JP 23320585 A JP23320585 A JP 23320585A JP S6293937 A JPS6293937 A JP S6293937A
Authority
JP
Japan
Prior art keywords
processing
chamber
microwave
processing chambers
chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23320585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513375B2 (enExample
Inventor
Masaharu Saikai
西海　正治
Yoshifumi Ogawa
芳文 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP23320585A priority Critical patent/JPS6293937A/ja
Publication of JPS6293937A publication Critical patent/JPS6293937A/ja
Publication of JPH0513375B2 publication Critical patent/JPH0513375B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP23320585A 1985-10-21 1985-10-21 マイクロ波プラズマ処理装置 Granted JPS6293937A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23320585A JPS6293937A (ja) 1985-10-21 1985-10-21 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23320585A JPS6293937A (ja) 1985-10-21 1985-10-21 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS6293937A true JPS6293937A (ja) 1987-04-30
JPH0513375B2 JPH0513375B2 (enExample) 1993-02-22

Family

ID=16951398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23320585A Granted JPS6293937A (ja) 1985-10-21 1985-10-21 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS6293937A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62298106A (ja) * 1986-06-18 1987-12-25 Nec Corp マイクロ波プラズマｃｖｄ装置
JPH01239841A (ja) * 1988-03-19 1989-09-25 Sanyo Electric Co Ltd 薄膜形成方法
WO2004054705A1 (en) * 2002-12-18 2004-07-01 Biotage Ab Microwave heating system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61189642A (ja) * 1985-02-18 1986-08-23 Mitsubishi Electric Corp プラズマ反応装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61189642A (ja) * 1985-02-18 1986-08-23 Mitsubishi Electric Corp プラズマ反応装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62298106A (ja) * 1986-06-18 1987-12-25 Nec Corp マイクロ波プラズマｃｖｄ装置
JPH01239841A (ja) * 1988-03-19 1989-09-25 Sanyo Electric Co Ltd 薄膜形成方法
WO2004054705A1 (en) * 2002-12-18 2004-07-01 Biotage Ab Microwave heating system

Also Published As

Publication number Publication date
JPH0513375B2 (enExample) 1993-02-22

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