JPS6293362U - - Google Patents
Info
- Publication number
- JPS6293362U JPS6293362U JP18588785U JP18588785U JPS6293362U JP S6293362 U JPS6293362 U JP S6293362U JP 18588785 U JP18588785 U JP 18588785U JP 18588785 U JP18588785 U JP 18588785U JP S6293362 U JPS6293362 U JP S6293362U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- substrate
- mask
- recess
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000007740 vapor deposition Methods 0.000 claims 5
- 230000008021 deposition Effects 0.000 claims 1
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18588785U JPS6293362U (es) | 1985-12-02 | 1985-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18588785U JPS6293362U (es) | 1985-12-02 | 1985-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6293362U true JPS6293362U (es) | 1987-06-15 |
Family
ID=31134934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18588785U Pending JPS6293362U (es) | 1985-12-02 | 1985-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6293362U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02149662A (ja) * | 1988-10-03 | 1990-06-08 | Internatl Business Mach Corp <Ibm> | 蒸着治具 |
-
1985
- 1985-12-02 JP JP18588785U patent/JPS6293362U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02149662A (ja) * | 1988-10-03 | 1990-06-08 | Internatl Business Mach Corp <Ibm> | 蒸着治具 |
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