JPS61133558U - - Google Patents

Info

Publication number
JPS61133558U
JPS61133558U JP1749285U JP1749285U JPS61133558U JP S61133558 U JPS61133558 U JP S61133558U JP 1749285 U JP1749285 U JP 1749285U JP 1749285 U JP1749285 U JP 1749285U JP S61133558 U JPS61133558 U JP S61133558U
Authority
JP
Japan
Prior art keywords
filament
hole
vacuum chamber
metal vapor
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1749285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342034Y2 (es
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1749285U priority Critical patent/JPH0342034Y2/ja
Publication of JPS61133558U publication Critical patent/JPS61133558U/ja
Application granted granted Critical
Publication of JPH0342034Y2 publication Critical patent/JPH0342034Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1749285U 1985-02-08 1985-02-08 Expired JPH0342034Y2 (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1749285U JPH0342034Y2 (es) 1985-02-08 1985-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1749285U JPH0342034Y2 (es) 1985-02-08 1985-02-08

Publications (2)

Publication Number Publication Date
JPS61133558U true JPS61133558U (es) 1986-08-20
JPH0342034Y2 JPH0342034Y2 (es) 1991-09-03

Family

ID=30505245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1749285U Expired JPH0342034Y2 (es) 1985-02-08 1985-02-08

Country Status (1)

Country Link
JP (1) JPH0342034Y2 (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03107452A (ja) * 1989-09-08 1991-05-07 Internatl Business Mach Corp <Ibm> 気相付着装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03107452A (ja) * 1989-09-08 1991-05-07 Internatl Business Mach Corp <Ibm> 気相付着装置

Also Published As

Publication number Publication date
JPH0342034Y2 (es) 1991-09-03

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