JPS63123667U - - Google Patents
Info
- Publication number
- JPS63123667U JPS63123667U JP1639887U JP1639887U JPS63123667U JP S63123667 U JPS63123667 U JP S63123667U JP 1639887 U JP1639887 U JP 1639887U JP 1639887 U JP1639887 U JP 1639887U JP S63123667 U JPS63123667 U JP S63123667U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- cooling block
- vapor deposition
- metal material
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1639887U JPS63123667U (es) | 1987-02-05 | 1987-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1639887U JPS63123667U (es) | 1987-02-05 | 1987-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63123667U true JPS63123667U (es) | 1988-08-11 |
Family
ID=30808217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1639887U Pending JPS63123667U (es) | 1987-02-05 | 1987-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63123667U (es) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57155377A (en) * | 1981-03-20 | 1982-09-25 | Nec Corp | Evaporating apparatus |
-
1987
- 1987-02-05 JP JP1639887U patent/JPS63123667U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57155377A (en) * | 1981-03-20 | 1982-09-25 | Nec Corp | Evaporating apparatus |
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