JPS61198266U - - Google Patents
Info
- Publication number
- JPS61198266U JPS61198266U JP7962285U JP7962285U JPS61198266U JP S61198266 U JPS61198266 U JP S61198266U JP 7962285 U JP7962285 U JP 7962285U JP 7962285 U JP7962285 U JP 7962285U JP S61198266 U JPS61198266 U JP S61198266U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- nozzle
- forming apparatus
- thin film
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7962285U JPS61198266U (es) | 1985-05-28 | 1985-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7962285U JPS61198266U (es) | 1985-05-28 | 1985-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61198266U true JPS61198266U (es) | 1986-12-11 |
Family
ID=30624708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7962285U Pending JPS61198266U (es) | 1985-05-28 | 1985-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61198266U (es) |
-
1985
- 1985-05-28 JP JP7962285U patent/JPS61198266U/ja active Pending