JPS6311900U - - Google Patents
Info
- Publication number
- JPS6311900U JPS6311900U JP10500986U JP10500986U JPS6311900U JP S6311900 U JPS6311900 U JP S6311900U JP 10500986 U JP10500986 U JP 10500986U JP 10500986 U JP10500986 U JP 10500986U JP S6311900 U JPS6311900 U JP S6311900U
- Authority
- JP
- Japan
- Prior art keywords
- resist film
- resist
- solvent
- film stripping
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002904 solvent Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims 2
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10500986U JPS6311900U (es) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10500986U JPS6311900U (es) | 1986-07-10 | 1986-07-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6311900U true JPS6311900U (es) | 1988-01-26 |
Family
ID=30979033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10500986U Pending JPS6311900U (es) | 1986-07-10 | 1986-07-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6311900U (es) |
-
1986
- 1986-07-10 JP JP10500986U patent/JPS6311900U/ja active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6311900U (es) | ||
JP2507587B2 (ja) | 吹き付け式半導体基板等吸着装置 | |
JPS61198265U (es) | ||
JPH02137037U (es) | ||
JPS61198266U (es) | ||
JPS6041951U (ja) | スプレ−式液処理装置 | |
JPS61108359U (es) | ||
JPS61111151U (es) | ||
JPH0318165U (es) | ||
JPS61140355U (es) | ||
JPS6017271U (ja) | 塗装装置 | |
JPH02133475U (es) | ||
JPH01125357U (es) | ||
JPS62138440U (es) | ||
JPS5961874U (ja) | スピ−ドスプレ−ヤの散布装置 | |
JPH01106565U (es) | ||
JPS62143462U (es) | ||
JPS61125045U (es) | ||
JPS6332666U (es) | ||
JPH0192130U (es) | ||
JPH0227724U (es) | ||
JPS6231969U (es) | ||
JPS61164029U (es) | ||
JPS63100825U (es) | ||
JPS6448170U (es) |