JPS629325Y2 - - Google Patents
Info
- Publication number
- JPS629325Y2 JPS629325Y2 JP18584384U JP18584384U JPS629325Y2 JP S629325 Y2 JPS629325 Y2 JP S629325Y2 JP 18584384 U JP18584384 U JP 18584384U JP 18584384 U JP18584384 U JP 18584384U JP S629325 Y2 JPS629325 Y2 JP S629325Y2
- Authority
- JP
- Japan
- Prior art keywords
- ring
- reaction tube
- shaped frame
- elastic ring
- elastic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010453 quartz Substances 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- 235000012431 wafers Nutrition 0.000 description 4
- 238000007789 sealing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18584384U JPS629325Y2 (de) | 1984-12-07 | 1984-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18584384U JPS629325Y2 (de) | 1984-12-07 | 1984-12-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61103466U JPS61103466U (de) | 1986-07-01 |
| JPS629325Y2 true JPS629325Y2 (de) | 1987-03-04 |
Family
ID=30743304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18584384U Expired JPS629325Y2 (de) | 1984-12-07 | 1984-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS629325Y2 (de) |
-
1984
- 1984-12-07 JP JP18584384U patent/JPS629325Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61103466U (de) | 1986-07-01 |
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