JPS6292642U - - Google Patents
Info
- Publication number
- JPS6292642U JPS6292642U JP1985184156U JP18415685U JPS6292642U JP S6292642 U JPS6292642 U JP S6292642U JP 1985184156 U JP1985184156 U JP 1985184156U JP 18415685 U JP18415685 U JP 18415685U JP S6292642 U JPS6292642 U JP S6292642U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- nozzle
- purge gas
- angle
- purge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000000428 dust Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985184156U JPS6292642U (US08063081-20111122-C00044.png) | 1985-11-29 | 1985-11-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985184156U JPS6292642U (US08063081-20111122-C00044.png) | 1985-11-29 | 1985-11-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6292642U true JPS6292642U (US08063081-20111122-C00044.png) | 1987-06-13 |
Family
ID=31131563
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985184156U Pending JPS6292642U (US08063081-20111122-C00044.png) | 1985-11-29 | 1985-11-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6292642U (US08063081-20111122-C00044.png) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01225125A (ja) * | 1988-01-11 | 1989-09-08 | Perkin Elmer Corp:The | 表面から微粒子を掃除する方法 |
JP2001194801A (ja) * | 2000-01-14 | 2001-07-19 | Toshiba Corp | 露光装置 |
JP2013071083A (ja) * | 2011-09-28 | 2013-04-22 | Tokyo Electron Ltd | パーティクル捕集装置及びパーティクルの捕集方法 |
WO2017204333A1 (ja) * | 2016-05-27 | 2017-11-30 | 株式会社新川 | 異物除去装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5515620A (en) * | 1978-07-20 | 1980-02-02 | Fujitsu Ltd | Washing method |
JPS5990854A (ja) * | 1983-10-05 | 1984-05-25 | Hitachi Ltd | 板状物エアブロ−機構 |
-
1985
- 1985-11-29 JP JP1985184156U patent/JPS6292642U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5515620A (en) * | 1978-07-20 | 1980-02-02 | Fujitsu Ltd | Washing method |
JPS5990854A (ja) * | 1983-10-05 | 1984-05-25 | Hitachi Ltd | 板状物エアブロ−機構 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01225125A (ja) * | 1988-01-11 | 1989-09-08 | Perkin Elmer Corp:The | 表面から微粒子を掃除する方法 |
JP2001194801A (ja) * | 2000-01-14 | 2001-07-19 | Toshiba Corp | 露光装置 |
JP2013071083A (ja) * | 2011-09-28 | 2013-04-22 | Tokyo Electron Ltd | パーティクル捕集装置及びパーティクルの捕集方法 |
WO2017204333A1 (ja) * | 2016-05-27 | 2017-11-30 | 株式会社新川 | 異物除去装置 |
KR20190013903A (ko) * | 2016-05-27 | 2019-02-11 | 가부시키가이샤 신가와 | 이물 제거 장치 |
JPWO2017204333A1 (ja) * | 2016-05-27 | 2019-02-28 | 株式会社新川 | 異物除去装置 |
CN109478508A (zh) * | 2016-05-27 | 2019-03-15 | 株式会社新川 | 异物去除装置 |