JPS6292319A - 目合せ装置 - Google Patents

目合せ装置

Info

Publication number
JPS6292319A
JPS6292319A JP60232699A JP23269985A JPS6292319A JP S6292319 A JPS6292319 A JP S6292319A JP 60232699 A JP60232699 A JP 60232699A JP 23269985 A JP23269985 A JP 23269985A JP S6292319 A JPS6292319 A JP S6292319A
Authority
JP
Japan
Prior art keywords
alignment
microscope
electronic switch
rotating mirror
marks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60232699A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0466377B2 (enExample
Inventor
Chiyoushin Sai
兆申 蔡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60232699A priority Critical patent/JPS6292319A/ja
Publication of JPS6292319A publication Critical patent/JPS6292319A/ja
Publication of JPH0466377B2 publication Critical patent/JPH0466377B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP60232699A 1985-10-17 1985-10-17 目合せ装置 Granted JPS6292319A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60232699A JPS6292319A (ja) 1985-10-17 1985-10-17 目合せ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60232699A JPS6292319A (ja) 1985-10-17 1985-10-17 目合せ装置

Publications (2)

Publication Number Publication Date
JPS6292319A true JPS6292319A (ja) 1987-04-27
JPH0466377B2 JPH0466377B2 (enExample) 1992-10-23

Family

ID=16943385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60232699A Granted JPS6292319A (ja) 1985-10-17 1985-10-17 目合せ装置

Country Status (1)

Country Link
JP (1) JPS6292319A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6457638A (en) * 1987-08-28 1989-03-03 Hitachi Ltd Pre-aligner device
CN106680991A (zh) * 2016-07-26 2017-05-17 京东方科技集团股份有限公司 识别装置及对位设备

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6457638A (en) * 1987-08-28 1989-03-03 Hitachi Ltd Pre-aligner device
CN106680991A (zh) * 2016-07-26 2017-05-17 京东方科技集团股份有限公司 识别装置及对位设备

Also Published As

Publication number Publication date
JPH0466377B2 (enExample) 1992-10-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees