JPS628998Y2 - - Google Patents
Info
- Publication number
- JPS628998Y2 JPS628998Y2 JP1978093117U JP9311778U JPS628998Y2 JP S628998 Y2 JPS628998 Y2 JP S628998Y2 JP 1978093117 U JP1978093117 U JP 1978093117U JP 9311778 U JP9311778 U JP 9311778U JP S628998 Y2 JPS628998 Y2 JP S628998Y2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- lapping
- carrier
- support
- wrapping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 5
- 239000003795 chemical substances by application Substances 0.000 description 24
- 238000005498 polishing Methods 0.000 description 18
- 239000002245 particle Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000004809 Teflon Substances 0.000 description 4
- 229920006362 Teflon® Polymers 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978093117U JPS628998Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1978-07-06 | 1978-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978093117U JPS628998Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1978-07-06 | 1978-07-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5511842U JPS5511842U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-01-25 |
| JPS628998Y2 true JPS628998Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-03-02 |
Family
ID=29023929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978093117U Expired JPS628998Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1978-07-06 | 1978-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS628998Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1978
- 1978-07-06 JP JP1978093117U patent/JPS628998Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5511842U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-01-25 |