JPS6289295A - 磁気記憶素子及びその作製方法 - Google Patents
磁気記憶素子及びその作製方法Info
- Publication number
- JPS6289295A JPS6289295A JP60231658A JP23165885A JPS6289295A JP S6289295 A JPS6289295 A JP S6289295A JP 60231658 A JP60231658 A JP 60231658A JP 23165885 A JP23165885 A JP 23165885A JP S6289295 A JPS6289295 A JP S6289295A
- Authority
- JP
- Japan
- Prior art keywords
- film
- pattern
- bloch
- pair
- vbl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000463 material Substances 0.000 claims abstract description 17
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 11
- 238000003860 storage Methods 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 4
- 230000005415 magnetization Effects 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 230000005294 ferromagnetic effect Effects 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 13
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 abstract description 6
- 239000004793 Polystyrene Substances 0.000 abstract description 5
- 229920002223 polystyrene Polymers 0.000 abstract description 5
- 229910000147 aluminium phosphate Inorganic materials 0.000 abstract description 3
- 230000008569 process Effects 0.000 abstract description 3
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 abstract description 2
- 238000003486 chemical etching Methods 0.000 abstract description 2
- 239000002904 solvent Substances 0.000 abstract description 2
- 239000008096 xylene Substances 0.000 abstract description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 37
- 230000008859 change Effects 0.000 description 8
- 238000005468 ion implantation Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000003302 ferromagnetic material Substances 0.000 description 3
- 230000006641 stabilisation Effects 0.000 description 3
- 238000011105 stabilization Methods 0.000 description 3
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000002223 garnet Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60231658A JPS6289295A (ja) | 1985-10-16 | 1985-10-16 | 磁気記憶素子及びその作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60231658A JPS6289295A (ja) | 1985-10-16 | 1985-10-16 | 磁気記憶素子及びその作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6289295A true JPS6289295A (ja) | 1987-04-23 |
| JPH0366755B2 JPH0366755B2 (OSRAM) | 1991-10-18 |
Family
ID=16926944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60231658A Granted JPS6289295A (ja) | 1985-10-16 | 1985-10-16 | 磁気記憶素子及びその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6289295A (OSRAM) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2618013A1 (fr) * | 1987-07-06 | 1989-01-13 | Canon Kk | Procede pour transferer des lignes de bloch et memoire a lignes de bloch |
| US7909563B2 (en) | 2004-11-30 | 2011-03-22 | Cascade Corporation | Fork positioner |
| US8403618B2 (en) | 2004-11-30 | 2013-03-26 | Cascade Corporation | Lift truck load handler |
-
1985
- 1985-10-16 JP JP60231658A patent/JPS6289295A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2618013A1 (fr) * | 1987-07-06 | 1989-01-13 | Canon Kk | Procede pour transferer des lignes de bloch et memoire a lignes de bloch |
| US7909563B2 (en) | 2004-11-30 | 2011-03-22 | Cascade Corporation | Fork positioner |
| US8403618B2 (en) | 2004-11-30 | 2013-03-26 | Cascade Corporation | Lift truck load handler |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0366755B2 (OSRAM) | 1991-10-18 |
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