JPS6288752U - - Google Patents

Info

Publication number

JPS6288752U

JPS6288752U JP17699585U JP17699585U JPS6288752U JP S6288752 U JPS6288752 U JP S6288752U JP 17699585 U JP17699585 U JP 17699585U JP 17699585 U JP17699585 U JP 17699585U JP S6288752 U JPS6288752 U JP S6288752U

Authority

JP

Japan

Prior art keywords

substrate support

electrode

cvd apparatus

plasma cvd

utility

Prior art date

1985-11-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 9
• 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 4
• 239000012212 insulator Substances 0.000 claims description 2
• 239000000463 material Substances 0.000 claims 1
• 239000002994 raw material Substances 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1
• 238000000605 extraction Methods 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 238000002360 preparation method Methods 0.000 description 1
• 238000000926 separation method Methods 0.000 description 1
• 238000002791 soaking Methods 0.000 description 1