JPS6228874U - - Google Patents
Info
- Publication number
- JPS6228874U JPS6228874U JP11829485U JP11829485U JPS6228874U JP S6228874 U JPS6228874 U JP S6228874U JP 11829485 U JP11829485 U JP 11829485U JP 11829485 U JP11829485 U JP 11829485U JP S6228874 U JPS6228874 U JP S6228874U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- electrode
- bonded
- plasma cvd
- ceramic heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000009795 derivation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11829485U JPH0454Y2 (enExample) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11829485U JPH0454Y2 (enExample) | 1985-07-31 | 1985-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6228874U true JPS6228874U (enExample) | 1987-02-21 |
| JPH0454Y2 JPH0454Y2 (enExample) | 1992-01-06 |
Family
ID=31004613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11829485U Expired JPH0454Y2 (enExample) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0454Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013508956A (ja) * | 2010-06-11 | 2013-03-07 | 深▲せん▼市創益科技発展有限公司 | シリコン系薄膜太陽電池のための可動治具 |
-
1985
- 1985-07-31 JP JP11829485U patent/JPH0454Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013508956A (ja) * | 2010-06-11 | 2013-03-07 | 深▲せん▼市創益科技発展有限公司 | シリコン系薄膜太陽電池のための可動治具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0454Y2 (enExample) | 1992-01-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6228874U (enExample) | ||
| JPS6236067U (enExample) | ||
| JP2586081Y2 (ja) | プラズマ処理装置 | |
| JPH0469465U (enExample) | ||
| JPS6293365U (enExample) | ||
| JPH0610675Y2 (ja) | プラズマ処理装置 | |
| JPH0521246Y2 (enExample) | ||
| JPH0650111B2 (ja) | Ｒｆ型イオン源 | |
| JPH0650110B2 (ja) | Ｒｆ型イオン源 | |
| JPS5863376A (ja) | 高周波解凍装置 | |
| JPS6026099Y2 (ja) | プラズマ重合装置の内部電極構造 | |
| JP2568132Y2 (ja) | 高周波誘導結合プラズマ質量分析計における排気装置 | |
| JPS6346465U (enExample) | ||
| JPS6274332U (enExample) | ||
| JPH0267632U (enExample) | ||
| JPS6370648U (enExample) | ||
| JPS629324Y2 (enExample) | ||
| JPS62192633U (enExample) | ||
| JPS55158266A (en) | Electrode structure for electric discharge in vacuum reacion furnace | |
| JPS6236065U (enExample) | ||
| JPS58154554U (ja) | 高周波イオン源 | |
| JPS6182958U (enExample) | ||
| JPS6346839U (enExample) | ||
| JPS60181027U (ja) | 反応性イオンエツチング装置 | |
| JPS57124834A (en) | Microwave tube |