JPS6293365U - - Google Patents
Info
- Publication number
- JPS6293365U JPS6293365U JP1985181542U JP18154285U JPS6293365U JP S6293365 U JPS6293365 U JP S6293365U JP 1985181542 U JP1985181542 U JP 1985181542U JP 18154285 U JP18154285 U JP 18154285U JP S6293365 U JPS6293365 U JP S6293365U
- Authority
- JP
- Japan
- Prior art keywords
- target
- ground electrode
- electrode
- insulating material
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985181542U JPS6293365U (enExample) | 1985-11-27 | 1985-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985181542U JPS6293365U (enExample) | 1985-11-27 | 1985-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6293365U true JPS6293365U (enExample) | 1987-06-15 |
Family
ID=31126506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985181542U Pending JPS6293365U (enExample) | 1985-11-27 | 1985-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6293365U (enExample) |
-
1985
- 1985-11-27 JP JP1985181542U patent/JPS6293365U/ja active Pending