JPS6293365U - - Google Patents
Info
- Publication number
- JPS6293365U JPS6293365U JP18154285U JP18154285U JPS6293365U JP S6293365 U JPS6293365 U JP S6293365U JP 18154285 U JP18154285 U JP 18154285U JP 18154285 U JP18154285 U JP 18154285U JP S6293365 U JPS6293365 U JP S6293365U
- Authority
- JP
- Japan
- Prior art keywords
- target
- ground electrode
- electrode
- insulating material
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 2
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図、第２図は本考案の一実施例のスパツタ
リング装置の構造を示す断面図である。
１…真空容器、２…絶縁物、３…ターゲツト、
４…ターゲツト電極、５…高周波電源、６…基板
、７…基板電極、９…絶縁カバー、１０…絶縁物
。
1 and 2 are cross-sectional views showing the structure of a sputtering apparatus according to an embodiment of the present invention. 1... Vacuum container, 2... Insulator, 3... Target,
4... Target electrode, 5... High frequency power supply, 6... Substrate, 7... Substrate electrode, 9... Insulating cover, 10... Insulator.
Claims (1)
電極を有し、該ターゲツト電極およびターゲツト
と接地電極との間隔が放電が生じない距離である
か、または該間隙に石英等の絶縁物を設置する高
周波を用いたスパツタリング装置において接地電
極表面の周囲の少なくとも一部に放電が生じない
程度に近接して絶縁物を覆つたことを特徴とする
スパツタリング装置。 A target electrode and a ground electrode near the target are provided, and the distance between the target electrode and the ground electrode is such that no discharge occurs, or an insulating material such as quartz is installed in the gap. 1. A sputtering device characterized in that at least a portion of the periphery of a ground electrode surface is covered with an insulating material so close as to prevent generation of electric discharge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18154285U JPS6293365U (en) | 1985-11-27 | 1985-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18154285U JPS6293365U (en) | 1985-11-27 | 1985-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6293365U true JPS6293365U (en) | 1987-06-15 |
Family
ID=31126506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18154285U Pending JPS6293365U (en) | 1985-11-27 | 1985-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6293365U (en) |
-
1985
- 1985-11-27 JP JP18154285U patent/JPS6293365U/ja active Pending
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