JPS61129870U - - Google Patents
Info
- Publication number
- JPS61129870U JPS61129870U JP1230885U JP1230885U JPS61129870U JP S61129870 U JPS61129870 U JP S61129870U JP 1230885 U JP1230885 U JP 1230885U JP 1230885 U JP1230885 U JP 1230885U JP S61129870 U JPS61129870 U JP S61129870U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- earth shield
- insulator
- conductive material
- openings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例に係るプラズマＣ
ＶＤ装置の部分断面図、第２図は従来のＣＶＤ装
置の説明図である。
１０……電極、１１……アースシールド、１２
……ガラス、１３，１３′……網状導電材。
Figure 1 shows a plasma C according to an embodiment of this invention.
FIG. 2 is a partial cross-sectional view of a VD device, and is an explanatory diagram of a conventional CVD device. 10... Electrode, 11... Earth shield, 12
...Glass, 13,13'...Reticular conductive material.
Claims (1)
ースシールドと略平行に配設されて反応ガスを噴
出するとともに、前記開口部と同軸の開口部を形
成された電極と、 前記両開口部に嵌め付けられる光透過性の絶縁
体と、 前記両開口部の両端開口面に露出する絶縁体の
表面にそれぞれ設けられ、その端部が前記アース
シールド及び電極にそれぞれ電気的に接続された
網状導電材とを具備したことを特徴とするプラズ
マＣＶＤ装置。[Claims for Utility Model Registration] An earth shield having an opening formed therein, and an electrode disposed substantially parallel to the earth shield to eject a reactive gas and having an opening coaxial with the opening. , a light-transmissive insulator fitted into both the openings, and an insulator provided on the surface of the insulator exposed at both end opening surfaces of the both openings, the ends of which are electrically connected to the earth shield and the electrode, respectively. 1. A plasma CVD apparatus comprising: a reticular conductive material connected to the conductive material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1230885U JPS61129870U (en) | 1985-01-30 | 1985-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1230885U JPS61129870U (en) | 1985-01-30 | 1985-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61129870U true JPS61129870U (en) | 1986-08-14 |
Family
ID=30495248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1230885U Pending JPS61129870U (en) | 1985-01-30 | 1985-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61129870U (en) |
-
1985
- 1985-01-30 JP JP1230885U patent/JPS61129870U/ja active Pending