JPS6236067U - - Google Patents
Info
- Publication number
- JPS6236067U JPS6236067U JP12304885U JP12304885U JPS6236067U JP S6236067 U JPS6236067 U JP S6236067U JP 12304885 U JP12304885 U JP 12304885U JP 12304885 U JP12304885 U JP 12304885U JP S6236067 U JPS6236067 U JP S6236067U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- plate
- grounding
- electrode plate
- shield member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図はこの考案の１実施例であるプラズマＣ
ＶＤ装置の電極部の構成を、第３図のＡ部の拡大
断面図で示した部分断面図、第２図は別な実施例
の同じく部分断面図、第３図はプラズマＣＶＤ装
置の電極部の一般的な構成を示す模式図、第４図
、第５図は従来の装置の構成を同じく第３図のＡ
部の部分拡大断面図で示した部分断面図である。
１……真空チヤンバ、２……高周波電源、３…
…マツチング回路、４……電極板（放電電極板）
、５……アース用シールド板、５′……アース用
シールド部材、６……電気絶縁シールド板、７…
…隙間、８……基板ホルダ、Ｈ……ヒータ、Ｋ…
…基板。
Figure 1 shows one embodiment of this invention, plasma C.
A partial sectional view showing the structure of the electrode section of the VD device using an enlarged sectional view of part A in FIG. 3, FIG. 2 is a partial sectional view of another embodiment, and FIG. 3 shows the electrode section of the plasma CVD device. Figures 4 and 5 are schematic diagrams showing the general configuration of the conventional device, and are similar to A in Figure 3.
FIG. 1... Vacuum chamber, 2... High frequency power supply, 3...
...Matching circuit, 4...Electrode plate (discharge electrode plate)
, 5...Earth shield plate, 5'...Earth shield member, 6...Electrical insulation shield plate, 7...
...Gap, 8...Substrate holder, H...Heater, K...
…substrate.
Claims (1)
に対向させて配設し、前記電極板の周面ならびに
裏面側に電気絶縁シールド板を接合し、さらにこ
の電気絶縁シールド板を包囲してアース用シール
ド板を接合することにより構成してなるプラズマ
ＣＶＤ装置の電極部において、前記電気絶縁シー
ルド板の電極板の周面部分を前端側から部分的に
切除し、この切除部分にアース用シールド部材を
接合してそのアース用シールド部材と前記電極板
の周面との間に所定の隙間を保持させるか、また
は前記アース用シールド板を屈曲させてそのアー
ス用シールド板と前記電極板の周面との間に所定
の隙間を保持して配設したことを特徴とするプラ
ズマＣＶＤ装置の電極部。 An electrode plate and a substrate are arranged facing each other in the inner space of the vacuum chamber, an electrically insulating shield plate is bonded to the circumferential surface and the back side of the electrode plate, and the electrically insulating shield plate is further surrounded to provide grounding. In the electrode part of the plasma CVD apparatus constructed by joining shield plates, the peripheral surface of the electrode plate of the electrically insulating shield plate is partially cut off from the front end side, and a grounding shield member is attached to this cut part. Either by bonding the grounding shield member and maintaining a predetermined gap between the grounding shield member and the circumferential surface of the electrode plate, or by bending the grounding shield plate so that the grounding shield member and the circumferential surface of the electrode plate An electrode section for a plasma CVD apparatus, characterized in that the electrode section is arranged with a predetermined gap maintained between the electrode sections.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12304885U JPH0455Y2 (en) | 1985-08-09 | 1985-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12304885U JPH0455Y2 (en) | 1985-08-09 | 1985-08-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6236067U true JPS6236067U (en) | 1987-03-03 |
| JPH0455Y2 JPH0455Y2 (en) | 1992-01-06 |
Family
ID=31013797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12304885U Expired JPH0455Y2 (en) | 1985-08-09 | 1985-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455Y2 (en) |
-
1985
- 1985-08-09 JP JP12304885U patent/JPH0455Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0455Y2 (en) | 1992-01-06 |
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