JPS6288549U - - Google Patents

Description

[Brief explanation of the drawing]

Fig. 1 is a configuration diagram showing one embodiment of an optical foreign object detection device according to the present invention, Fig. 2 is an external perspective view showing a foreign object detector used in this foreign object detection device, and Fig. 3 is a configuration diagram showing an embodiment of an optical foreign object detection device according to the present invention. A plan view showing an example in which the region is a foreign object detection plate surface, FIG. 4 is a plan view showing the size of a foreign object detection plate surface that can be detected using one optical foreign object detection means, and FIG. 5 is a plan view showing a foreign object detection plate surface that can be detected using one optical foreign object detection means. FIG. 6 is a front view showing the configuration of a foreign object detector that sometimes causes a blind spot; FIG. 6 is a plan view showing a blind spot that occurs when using this foreign object detector;
FIG. 7 is an external perspective view showing another example of a foreign object detector that does not have a blind spot. 1...Work table, 2a, 2b...Light source, 4a
, 4b... Half mirror, 5a, 5b... Rotating mirror, 6a, 6b... Pulse motor, 7a, 7b... Reflective surface, 9a, 9b... Light receiving element, 10, 11... Foreign object detector.

Claims (1)

[Scope of utility model registration request] comprising first and second optical foreign object detection means disposed opposite to each other with a rectangular foreign object detection plate surface in between;
Each optical foreign object detection means has a reflective surface disposed adjacent to the foreign object detection plate surface, and an optical system disposed at a position facing the foreign object detection plate surface from the reflective surface. , this optical system includes a light source, a detector, a half mirror and a rotating mirror placed in the middle of an optical path that guides the light from the light source to the reflecting surface, and rotating the rotating mirror to reflect the light from the light source. a rotating mirror driving means for guiding light to a reflecting surface and guiding reflected light from the reflecting surface to the detector via the half mirror, and each rotating mirror of each optical foreign object detecting means is connected to the surface of the foreign object detection plate. 1. An optical foreign object detection device, wherein the optical foreign object detection device is arranged to face each other on opposing lines of a rectangular shape including the above-mentioned light sources, and is arranged so that all of the foreign objects on the plate surface can be irradiated with light from the light source.