JPS6285211A - ホトマスク顕微鏡自動焦点装置 - Google Patents

ホトマスク顕微鏡自動焦点装置

Info

Publication number
JPS6285211A
JPS6285211A JP60226120A JP22612085A JPS6285211A JP S6285211 A JPS6285211 A JP S6285211A JP 60226120 A JP60226120 A JP 60226120A JP 22612085 A JP22612085 A JP 22612085A JP S6285211 A JPS6285211 A JP S6285211A
Authority
JP
Japan
Prior art keywords
circuit
semiconductor laser
photomask
automatic focusing
amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60226120A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0560562B2 (enrdf_load_stackoverflow
Inventor
Makoto Tani
誠 谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60226120A priority Critical patent/JPS6285211A/ja
Publication of JPS6285211A publication Critical patent/JPS6285211A/ja
Publication of JPH0560562B2 publication Critical patent/JPH0560562B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Automatic Focus Adjustment (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60226120A 1985-10-09 1985-10-09 ホトマスク顕微鏡自動焦点装置 Granted JPS6285211A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60226120A JPS6285211A (ja) 1985-10-09 1985-10-09 ホトマスク顕微鏡自動焦点装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60226120A JPS6285211A (ja) 1985-10-09 1985-10-09 ホトマスク顕微鏡自動焦点装置

Publications (2)

Publication Number Publication Date
JPS6285211A true JPS6285211A (ja) 1987-04-18
JPH0560562B2 JPH0560562B2 (enrdf_load_stackoverflow) 1993-09-02

Family

ID=16840150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60226120A Granted JPS6285211A (ja) 1985-10-09 1985-10-09 ホトマスク顕微鏡自動焦点装置

Country Status (1)

Country Link
JP (1) JPS6285211A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0560562B2 (enrdf_load_stackoverflow) 1993-09-02

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