JPS6283127U - - Google Patents
Info
- Publication number
- JPS6283127U JPS6283127U JP17369285U JP17369285U JPS6283127U JP S6283127 U JPS6283127 U JP S6283127U JP 17369285 U JP17369285 U JP 17369285U JP 17369285 U JP17369285 U JP 17369285U JP S6283127 U JPS6283127 U JP S6283127U
- Authority
- JP
- Japan
- Prior art keywords
- air
- room
- adhesive
- dust
- floor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 claims description 6
- 239000000428 dust Substances 0.000 claims description 5
- 239000002313 adhesive film Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000009423 ventilation Methods 0.000 claims description 2
- 238000004887 air purification Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17369285U JPH0233049Y2 (ko) | 1985-11-12 | 1985-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17369285U JPH0233049Y2 (ko) | 1985-11-12 | 1985-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6283127U true JPS6283127U (ko) | 1987-05-27 |
| JPH0233049Y2 JPH0233049Y2 (ko) | 1990-09-06 |
Family
ID=31111393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17369285U Expired JPH0233049Y2 (ko) | 1985-11-12 | 1985-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0233049Y2 (ko) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011032109A (ja) * | 2009-07-30 | 2011-02-17 | Nippon Steel Corp | 炭化珪素単結晶製造装置 |
| JP2011147842A (ja) * | 2010-01-19 | 2011-08-04 | Vessel Industrial Co Ltd | 除電除塵装置 |
| JP2021167723A (ja) * | 2021-07-15 | 2021-10-21 | 株式会社西部技研 | クリーンブース |
-
1985
- 1985-11-12 JP JP17369285U patent/JPH0233049Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011032109A (ja) * | 2009-07-30 | 2011-02-17 | Nippon Steel Corp | 炭化珪素単結晶製造装置 |
| JP2011147842A (ja) * | 2010-01-19 | 2011-08-04 | Vessel Industrial Co Ltd | 除電除塵装置 |
| JP2021167723A (ja) * | 2021-07-15 | 2021-10-21 | 株式会社西部技研 | クリーンブース |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0233049Y2 (ko) | 1990-09-06 |
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