JPS6280938A - チタン化合物フイ−ルドエミツタ−の製造方法 - Google Patents
チタン化合物フイ−ルドエミツタ−の製造方法Info
- Publication number
- JPS6280938A JPS6280938A JP60219835A JP21983585A JPS6280938A JP S6280938 A JPS6280938 A JP S6280938A JP 60219835 A JP60219835 A JP 60219835A JP 21983585 A JP21983585 A JP 21983585A JP S6280938 A JPS6280938 A JP S6280938A
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- surface treatment
- field emitter
- treatment
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 150000003609 titanium compounds Chemical class 0.000 title claims 5
- 238000004381 surface treatment Methods 0.000 claims description 18
- 230000005684 electric field Effects 0.000 claims description 12
- 239000013078 crystal Substances 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 239000004215 Carbon black (E152) Substances 0.000 claims description 4
- 229930195733 hydrocarbon Natural products 0.000 claims description 4
- 150000002430 hydrocarbons Chemical class 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 7
- 238000010894 electron beam technology Methods 0.000 description 4
- 230000001747 exhibiting effect Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001093 holography Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 150000003623 transition metal compounds Chemical class 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cold Cathode And The Manufacture (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60219835A JPS6280938A (ja) | 1985-10-02 | 1985-10-02 | チタン化合物フイ−ルドエミツタ−の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60219835A JPS6280938A (ja) | 1985-10-02 | 1985-10-02 | チタン化合物フイ−ルドエミツタ−の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6280938A true JPS6280938A (ja) | 1987-04-14 |
| JPH0577134B2 JPH0577134B2 (enExample) | 1993-10-26 |
Family
ID=16741794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60219835A Granted JPS6280938A (ja) | 1985-10-02 | 1985-10-02 | チタン化合物フイ−ルドエミツタ−の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6280938A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63279535A (ja) * | 1987-05-08 | 1988-11-16 | Natl Inst For Res In Inorg Mater | 炭窒化ニオブフイ−ルドエミツタ−の製造方法 |
| CN106549157A (zh) * | 2015-09-18 | 2017-03-29 | 中国科学院宁波材料技术与工程研究所 | 空心球形类石墨相c3n4和单质硫复合材料及其制法和应用 |
-
1985
- 1985-10-02 JP JP60219835A patent/JPS6280938A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63279535A (ja) * | 1987-05-08 | 1988-11-16 | Natl Inst For Res In Inorg Mater | 炭窒化ニオブフイ−ルドエミツタ−の製造方法 |
| CN106549157A (zh) * | 2015-09-18 | 2017-03-29 | 中国科学院宁波材料技术与工程研究所 | 空心球形类石墨相c3n4和单质硫复合材料及其制法和应用 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0577134B2 (enExample) | 1993-10-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |