JPS6280326U - - Google Patents
Info
- Publication number
- JPS6280326U JPS6280326U JP17177085U JP17177085U JPS6280326U JP S6280326 U JPS6280326 U JP S6280326U JP 17177085 U JP17177085 U JP 17177085U JP 17177085 U JP17177085 U JP 17177085U JP S6280326 U JPS6280326 U JP S6280326U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- reaction tube
- film production
- semiconductor epitaxial
- epitaxial thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17177085U JPS6280326U (OSRAM) | 1985-11-08 | 1985-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17177085U JPS6280326U (OSRAM) | 1985-11-08 | 1985-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6280326U true JPS6280326U (OSRAM) | 1987-05-22 |
Family
ID=31107703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17177085U Pending JPS6280326U (OSRAM) | 1985-11-08 | 1985-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6280326U (OSRAM) |
-
1985
- 1985-11-08 JP JP17177085U patent/JPS6280326U/ja active Pending
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