JPS627696A - 液相エピタキシャル成長方法及びその装置 - Google Patents
液相エピタキシャル成長方法及びその装置Info
- Publication number
- JPS627696A JPS627696A JP14579785A JP14579785A JPS627696A JP S627696 A JPS627696 A JP S627696A JP 14579785 A JP14579785 A JP 14579785A JP 14579785 A JP14579785 A JP 14579785A JP S627696 A JPS627696 A JP S627696A
- Authority
- JP
- Japan
- Prior art keywords
- mixed crystal
- growth
- solution
- reservoir
- soln
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14579785A JPS627696A (ja) | 1985-07-04 | 1985-07-04 | 液相エピタキシャル成長方法及びその装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14579785A JPS627696A (ja) | 1985-07-04 | 1985-07-04 | 液相エピタキシャル成長方法及びその装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS627696A true JPS627696A (ja) | 1987-01-14 |
JPH0481550B2 JPH0481550B2 (fr) | 1992-12-24 |
Family
ID=15393370
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14579785A Granted JPS627696A (ja) | 1985-07-04 | 1985-07-04 | 液相エピタキシャル成長方法及びその装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS627696A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6221792A (ja) * | 1985-07-18 | 1987-01-30 | Hitachi Cable Ltd | 液相エピタキシヤル成長装置 |
-
1985
- 1985-07-04 JP JP14579785A patent/JPS627696A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6221792A (ja) * | 1985-07-18 | 1987-01-30 | Hitachi Cable Ltd | 液相エピタキシヤル成長装置 |
JPH0532359B2 (fr) * | 1985-07-18 | 1993-05-14 | Hitachi Cable |
Also Published As
Publication number | Publication date |
---|---|
JPH0481550B2 (fr) | 1992-12-24 |
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