JPS627696A - 液相エピタキシャル成長方法及びその装置 - Google Patents

液相エピタキシャル成長方法及びその装置

Info

Publication number
JPS627696A
JPS627696A JP14579785A JP14579785A JPS627696A JP S627696 A JPS627696 A JP S627696A JP 14579785 A JP14579785 A JP 14579785A JP 14579785 A JP14579785 A JP 14579785A JP S627696 A JPS627696 A JP S627696A
Authority
JP
Japan
Prior art keywords
mixed crystal
growth
solution
reservoir
soln
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14579785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0481550B2 (fr
Inventor
Tsunehiro Unno
恒弘 海野
Mineo Wajima
峰生 和島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP14579785A priority Critical patent/JPS627696A/ja
Publication of JPS627696A publication Critical patent/JPS627696A/ja
Publication of JPH0481550B2 publication Critical patent/JPH0481550B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP14579785A 1985-07-04 1985-07-04 液相エピタキシャル成長方法及びその装置 Granted JPS627696A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14579785A JPS627696A (ja) 1985-07-04 1985-07-04 液相エピタキシャル成長方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14579785A JPS627696A (ja) 1985-07-04 1985-07-04 液相エピタキシャル成長方法及びその装置

Publications (2)

Publication Number Publication Date
JPS627696A true JPS627696A (ja) 1987-01-14
JPH0481550B2 JPH0481550B2 (fr) 1992-12-24

Family

ID=15393370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14579785A Granted JPS627696A (ja) 1985-07-04 1985-07-04 液相エピタキシャル成長方法及びその装置

Country Status (1)

Country Link
JP (1) JPS627696A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6221792A (ja) * 1985-07-18 1987-01-30 Hitachi Cable Ltd 液相エピタキシヤル成長装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6221792A (ja) * 1985-07-18 1987-01-30 Hitachi Cable Ltd 液相エピタキシヤル成長装置
JPH0532359B2 (fr) * 1985-07-18 1993-05-14 Hitachi Cable

Also Published As

Publication number Publication date
JPH0481550B2 (fr) 1992-12-24

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