JPS6275243A - ガスセンサ−表面に吸着したガス分子の脱離方法 - Google Patents
ガスセンサ−表面に吸着したガス分子の脱離方法Info
- Publication number
- JPS6275243A JPS6275243A JP21367085A JP21367085A JPS6275243A JP S6275243 A JPS6275243 A JP S6275243A JP 21367085 A JP21367085 A JP 21367085A JP 21367085 A JP21367085 A JP 21367085A JP S6275243 A JPS6275243 A JP S6275243A
- Authority
- JP
- Japan
- Prior art keywords
- junction
- desorption
- gas
- current
- gaseous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 6
- 239000004065 semiconductor Substances 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims abstract description 20
- 230000015556 catabolic process Effects 0.000 claims abstract description 7
- 238000003795 desorption Methods 0.000 abstract description 20
- 238000010438 heat treatment Methods 0.000 abstract description 11
- 230000006866 deterioration Effects 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 3
- 230000005684 electric field Effects 0.000 abstract description 2
- 238000004880 explosion Methods 0.000 abstract description 2
- 230000001939 inductive effect Effects 0.000 abstract description 2
- 230000002093 peripheral effect Effects 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 30
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 6
- 229910001882 dioxygen Inorganic materials 0.000 description 6
- 238000001179 sorption measurement Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- -1 such as i Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21367085A JPS6275243A (ja) | 1985-09-28 | 1985-09-28 | ガスセンサ−表面に吸着したガス分子の脱離方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21367085A JPS6275243A (ja) | 1985-09-28 | 1985-09-28 | ガスセンサ−表面に吸着したガス分子の脱離方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6275243A true JPS6275243A (ja) | 1987-04-07 |
| JPH0435031B2 JPH0435031B2 (enrdf_load_stackoverflow) | 1992-06-09 |
Family
ID=16643017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21367085A Granted JPS6275243A (ja) | 1985-09-28 | 1985-09-28 | ガスセンサ−表面に吸着したガス分子の脱離方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6275243A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0498272U (enrdf_load_stackoverflow) * | 1991-01-22 | 1992-08-25 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4930480A (enrdf_load_stackoverflow) * | 1972-07-10 | 1974-03-18 | ||
| JPS52121391A (en) * | 1976-04-06 | 1977-10-12 | Tokai Konetsu Kogyo Kk | Gas sensing apparatus with self cleaning mechanisms |
-
1985
- 1985-09-28 JP JP21367085A patent/JPS6275243A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4930480A (enrdf_load_stackoverflow) * | 1972-07-10 | 1974-03-18 | ||
| JPS52121391A (en) * | 1976-04-06 | 1977-10-12 | Tokai Konetsu Kogyo Kk | Gas sensing apparatus with self cleaning mechanisms |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0498272U (enrdf_load_stackoverflow) * | 1991-01-22 | 1992-08-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0435031B2 (enrdf_load_stackoverflow) | 1992-06-09 |
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