JPS6274629U - - Google Patents
Info
- Publication number
- JPS6274629U JPS6274629U JP16389785U JP16389785U JPS6274629U JP S6274629 U JPS6274629 U JP S6274629U JP 16389785 U JP16389785 U JP 16389785U JP 16389785 U JP16389785 U JP 16389785U JP S6274629 U JPS6274629 U JP S6274629U
- Authority
- JP
- Japan
- Prior art keywords
- screw
- holder base
- wafer
- arms
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16389785U JPH0717151Y2 (ja) | 1985-10-25 | 1985-10-25 | ウエハ保持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16389785U JPH0717151Y2 (ja) | 1985-10-25 | 1985-10-25 | ウエハ保持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6274629U true JPS6274629U (en, 2012) | 1987-05-13 |
| JPH0717151Y2 JPH0717151Y2 (ja) | 1995-04-19 |
Family
ID=31092520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16389785U Expired - Lifetime JPH0717151Y2 (ja) | 1985-10-25 | 1985-10-25 | ウエハ保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0717151Y2 (en, 2012) |
-
1985
- 1985-10-25 JP JP16389785U patent/JPH0717151Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0717151Y2 (ja) | 1995-04-19 |