JPS6210072Y2 - - Google Patents

Info

Publication number
JPS6210072Y2
JPS6210072Y2 JP1984011231U JP1123184U JPS6210072Y2 JP S6210072 Y2 JPS6210072 Y2 JP S6210072Y2 JP 1984011231 U JP1984011231 U JP 1984011231U JP 1123184 U JP1123184 U JP 1123184U JP S6210072 Y2 JPS6210072 Y2 JP S6210072Y2
Authority
JP
Japan
Prior art keywords
arm
cylindrical body
wheel
bearing
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984011231U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60125086U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1123184U priority Critical patent/JPS60125086U/ja
Publication of JPS60125086U publication Critical patent/JPS60125086U/ja
Application granted granted Critical
Publication of JPS6210072Y2 publication Critical patent/JPS6210072Y2/ja
Granted legal-status Critical Current

Links

JP1123184U 1984-01-30 1984-01-30 半導体ウエハ−の搬送装置 Granted JPS60125086U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1123184U JPS60125086U (ja) 1984-01-30 1984-01-30 半導体ウエハ−の搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1123184U JPS60125086U (ja) 1984-01-30 1984-01-30 半導体ウエハ−の搬送装置

Publications (2)

Publication Number Publication Date
JPS60125086U JPS60125086U (ja) 1985-08-23
JPS6210072Y2 true JPS6210072Y2 (en, 2012) 1987-03-09

Family

ID=30493158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1123184U Granted JPS60125086U (ja) 1984-01-30 1984-01-30 半導体ウエハ−の搬送装置

Country Status (1)

Country Link
JP (1) JPS60125086U (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0825151B2 (ja) * 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5127524B2 (en, 2012) * 1972-08-18 1976-08-13
JPS58154085U (ja) * 1982-04-07 1983-10-14 横河電機株式会社 密封容器の操作機構

Also Published As

Publication number Publication date
JPS60125086U (ja) 1985-08-23

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