JPS6273728A - Cleaning unit for semiconductor substrate containing box - Google Patents

Abstract

PURPOSE:To improve the capacity of a carrier cleaning by providing an inner brush which moves along the inner periphery of a containing box to clean the wall and outer brushes which move along the outer periphery is conjunction with the inner brush to clean the wall to simultaneously clean both the inner and outer surfaces of the carrier at high speed. CONSTITUTION:An inner brush 2 which cleans wall by elevationally reciprocating along the inner periphery of a carrier 1 is provided and outer brushes 3, 3 which clean wall by elevationally reciprocating along the outer periphery in cooperation with the brush 2 are provided. The brushes 2, 3 are synchronized to be reciprocated along both the inner and outer peripheral surfaces of the carrier 1 at the same timing. Thus, the inner and outer walls of the carrier 1 can be simultaneously cleaned in the same process step.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a semiconductor substrate storage box (hereinafter referred to as a carrier) for storing semiconductor substrates in a semiconductor integrated circuit manufacturing process.
The present invention relates to a cleaning device for cleaning.

[Conventional technology]

The carrier l has vertical grooves 1 on opposite side walls as shown in Figure 2.
cL, and a semiconductor substrate is fitted and held in a vertical groove ICL to be stored in a vertical position. A plurality of semiconductor substrates are stored in a carrier 1 and transported into a semiconductor integrated circuit manufacturing process.

The carrier I passes through various atmospheres during the manufacturing process and becomes dirty, so it needs to be cleaned periodically.

Conventionally, the carrier 1 was cleaned by moving the brush 1 up and down along the inner peripheral surface of the carrier 1 as shown in FIG. 2 to clean the wall surface.

[Problem that the invention seeks to solve]

Therefore, cleaning the outer circumferential surface of the carrier requires a curved device and must be carried out in a separate process, which has the disadvantage of hindering the improvement of the cleaning effect and cleaning speed of the gear rear.

The present invention solves the above problems and provides a cleaning device that speeds up the cleaning speed of the gear rear.

[Means for solving problems]

The present invention provides a cleaning device that uses a brush to clean a storage box that supports semiconductor substrates on both sides thereof and stores them in a vertical position. This cleaning device for a semiconductor substrate storage box is characterized by having an outer brush that moves along the outer peripheral surface in conjunction with the brush to clean the wall surface.

〔Example〕

Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

In FIG. 1, the present invention provides an inner brush 2 that cleans the wall surface by reciprocating up and down along the inner circumferential surface of the gear rear 1, and furthermore, on both sides of the inner brush 20, in conjunction with the inner plan 2, the inner brush 2 cleans the outer circumferential surface. It is provided with outer brushes 3, 3 that clean the wall surface by reciprocating up and down along the wall.

In the embodiment, the inner brush 2 and the outer brush 3 are synchronized and reciprocated up and down along both the inner and outer surfaces of the carrier 1 at the same timing. As a result, both the inner and outer wall surfaces of the carrier I are simultaneously cleaned in one step.

Although a circular brush is used in this embodiment, the shape, material, and location of the brush can be changed.

〔Effect of the invention〕

As explained above, the present invention uses the inner and outer brushes to clean both the inner and outer walls of the carrier at the same timing, thereby quickly cleaning both the inner and outer surfaces of the carrier at the same time, thereby increasing the carrier cleaning ability. This has the effect of preventing product defects due to carrier contamination.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention, and FIG. 2 is a configuration diagram showing a conventional example.

Claims (1)

[Claims] (1) In a cleaning device that uses a brush to clean a storage box that supports semiconductor substrates on both sides and stores them in a vertical position,
A cleaning device for a semiconductor substrate storage box, comprising an inner brush that cleans the wall surface along the inner peripheral surface of the storage box, and an outer brush that cleans the wall surface along the outer peripheral surface in conjunction with the inner brush. .