JPH0716657B2 - Semiconductor substrate storage box cleaning device - Google Patents
Semiconductor substrate storage box cleaning deviceInfo
- Publication number
- JPH0716657B2 JPH0716657B2 JP5804687A JP5804687A JPH0716657B2 JP H0716657 B2 JPH0716657 B2 JP H0716657B2 JP 5804687 A JP5804687 A JP 5804687A JP 5804687 A JP5804687 A JP 5804687A JP H0716657 B2 JPH0716657 B2 JP H0716657B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- storage box
- substrate storage
- cleaning device
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 title claims description 19
- 239000004065 semiconductor Substances 0.000 title claims description 12
- 239000000758 substrate Substances 0.000 title claims description 11
- 238000003860 storage Methods 0.000 title claims description 10
- 238000001035 drying Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 1
- 239000012050 conventional carrier Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は半導体集積回路製造工程において半導体基板を
収納する半導体基板収納箱（以下、単にキャリアと称す
る）を自動的に洗浄する洗浄装置に関する。The present invention relates to a cleaning device for automatically cleaning a semiconductor substrate storage box (hereinafter, simply referred to as a carrier) for storing a semiconductor substrate in a semiconductor integrated circuit manufacturing process.
従来のこの種の洗浄装置は、第２図に示す様に、コンベ
ア５の移動により、セットされたキャリア１の内外面の
洗浄及び乾燥を洗浄乾燥処理部６で行っていた。In the conventional cleaning apparatus of this type, as shown in FIG. 2, the cleaning / drying processing section 6 performs cleaning and drying of the inner and outer surfaces of the set carrier 1 by moving the conveyor 5.
このため、キャリア１の底面は、コンベア５上に置かれ
ている関係上、全く洗浄されないという欠点があった。Therefore, the bottom surface of the carrier 1 has a drawback that it is not cleaned at all because it is placed on the conveyor 5.
本発明の目的は、前記欠点が解決され、キャリアの底面
まで、良好に洗浄されるようにした半導体基板収納箱洗
浄装置を提供することにある。It is an object of the present invention to provide a semiconductor substrate storage box cleaning device in which the above-mentioned drawbacks are solved and the bottom surface of a carrier can be cleaned well.
本発明の半導体基板収納箱洗浄装置は、キャリアの胴体
部を保有して、洗浄ブラシの付いた底板上をすべらせな
がら、搬送する搬送部を有することを特徴とする。A semiconductor substrate storage box cleaning device of the present invention is characterized by having a carrier part that holds a body part of a carrier and slides on a bottom plate having a cleaning brush.
次に本発明について図面を参照して詳細に説明する。 Next, the present invention will be described in detail with reference to the drawings.
第１図は本発明の一実施例の半導体基板収納箱洗浄装置
を示す模式図である。同図に示すように、移動チェーン
２により胴体部を保持されたキャリア１を各工程へ搬送
する時に、洗浄用ブラシ３を取付けた底板４の上をすべ
らせ、洗浄乾燥処理部６より落下する洗浄液により、キ
ャリア１の底面を洗浄する。FIG. 1 is a schematic diagram showing a semiconductor substrate storage box cleaning device according to an embodiment of the present invention. As shown in the figure, when the carrier 1 having the body portion held by the moving chain 2 is conveyed to each process, it slides on the bottom plate 4 to which the cleaning brush 3 is attached and falls from the cleaning / drying processing unit 6. The bottom surface of the carrier 1 is washed with a washing liquid.
以上説明したように、本発明によれば、キャリア搬送時
にキャリア底面を底板でブラシ洗浄出来るため、キャリ
アの汚染による製品の不良を防ぐ事ができるという効果
が得られる。As described above, according to the present invention, since the bottom surface of the carrier can be brush-cleaned by the bottom plate during carrier transportation, it is possible to prevent product defects due to carrier contamination.
第１図は本発明の一実施例のキャリア洗浄装置を示す模
式図、第２図は従来のキャリア洗浄装置を示す模式図で
ある。 尚図において、１……キャリア（半導体基板収納箱）、
２……移動チェーン、３……洗浄用ブラシ、４……底
板、５……コンベア。FIG. 1 is a schematic view showing a carrier cleaning apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic view showing a conventional carrier cleaning apparatus. In the figure, 1 ... Carrier (semiconductor substrate storage box),
2 ... Moving chain, 3 ... Cleaning brush, 4 ... Bottom plate, 5 ... Conveyor.
Claims (1)
体基板収納箱洗浄装置において、前記半導体基板収納箱
の胴体部を保持して、洗浄ブラシの付いた底板上をすべ
らせながら、搬送する搬送部を持つ事を特徴とする半導
体基板収納箱洗浄装置。1. A semiconductor substrate storage box cleaning apparatus for automatically cleaning a semiconductor substrate storage box, holding a body of the semiconductor substrate storage box, and carrying it while sliding on a bottom plate having a cleaning brush. A semiconductor substrate storage box cleaning device characterized by having a transfer section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5804687A JPH0716657B2 (en) | 1987-03-13 | 1987-03-13 | Semiconductor substrate storage box cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5804687A JPH0716657B2 (en) | 1987-03-13 | 1987-03-13 | Semiconductor substrate storage box cleaning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63224781A JPS63224781A (en) | 1988-09-19 |
| JPH0716657B2 true JPH0716657B2 (en) | 1995-03-01 |
Family
ID=13072989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5804687A Expired - Lifetime JPH0716657B2 (en) | 1987-03-13 | 1987-03-13 | Semiconductor substrate storage box cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0716657B2 (en) |
-
1987
- 1987-03-13 JP JP5804687A patent/JPH0716657B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63224781A (en) | 1988-09-19 |
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