JPS63108742A - Belt conveying mechanism - Google Patents

Belt conveying mechanism

Info

Publication number
JPS63108742A
JPS63108742A JP61255047A JP25504786A JPS63108742A JP S63108742 A JPS63108742 A JP S63108742A JP 61255047 A JP61255047 A JP 61255047A JP 25504786 A JP25504786 A JP 25504786A JP S63108742 A JPS63108742 A JP S63108742A
Authority
JP
Japan
Prior art keywords
belt
chamber
nozzle
cleaning
conveying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61255047A
Other languages
Japanese (ja)
Inventor
Naoya Ito
Original Assignee
Nec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Corp filed Critical Nec Corp
Priority to JP61255047A priority Critical patent/JPS63108742A/en
Publication of JPS63108742A publication Critical patent/JPS63108742A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To hold the cleaning degree of a semiconductor substrate thereby to avoid the yield-decrease due to a contamination by cleaning and drying an endless belt on the way of returning step of the belt when the substrate is conveyed by the belt.
CONSTITUTION: A housing which forms a belt conveying mechanism is partitioned by a partition plate having a belt passing hole, one is used as a cleaning chamber 4 and the other is used as a drying chamber 5. A pair of pulleys 2 are provided at the upper side out of the housing, an endless belt 6 is engaged, a semiconductor substrate 1 is place thereon to be conveyed, and the belt 6 which has completed the conveying is passed through the chambers 4 and 5. In this configuration, an injection nozzle 8 and a pair of brushes 3 are provided in the chamber 4, the belt 6 interposed by brushes 3 is cleaned while cleanser is dropped from the nozzle 8, and rinsing solution is sprayed from another nozzle 9. Then, the belt 6 is advanced to the chamber 5, high temperature drying air is injected from a nozzle 10 for holding the belt 6 to dry the belt 6, which is then returned to the pulleys 2 to be circulated.
COPYRIGHT: (C)1988,JPO&Japio
JP61255047A 1986-10-27 1986-10-27 Belt conveying mechanism Pending JPS63108742A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61255047A JPS63108742A (en) 1986-10-27 1986-10-27 Belt conveying mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61255047A JPS63108742A (en) 1986-10-27 1986-10-27 Belt conveying mechanism

Publications (1)

Publication Number Publication Date
JPS63108742A true JPS63108742A (en) 1988-05-13

Family

ID=17273421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61255047A Pending JPS63108742A (en) 1986-10-27 1986-10-27 Belt conveying mechanism

Country Status (1)

Country Link
JP (1) JPS63108742A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02198663A (en) * 1989-01-27 1990-08-07 Showa Alum Can Kk Coating drying and baking device
JPH07206137A (en) * 1994-01-26 1995-08-08 Bridgestone Corp Cleaning device of conveyor belt
JP2002292347A (en) * 2001-03-30 2002-10-08 Sumitomo Bakelite Co Ltd Method and apparatus for cleaning and drying optical plastic film
WO2007086533A1 (en) * 2006-01-26 2007-08-02 Jfe Steel Corporation Method and apparatus for cleaning hot-dip galvanized steel sheet
CN101863374A (en) * 2010-06-11 2010-10-20 天津成科传动机电技术股份有限公司 Conveying belt cleaning maintainer and application method thereof
JP2012201438A (en) * 2011-03-24 2012-10-22 Misuzu Koki Kk Belt washing device
CN102991990A (en) * 2012-10-14 2013-03-27 昆山特力伯传动科技有限公司 Cleaning equipment of conveyer belt
CN103569635A (en) * 2013-11-19 2014-02-12 河南科隆集团有限公司 Washing and drying device of air-cushion belt conveyer
CN104003145A (en) * 2014-04-30 2014-08-27 楚天科技股份有限公司 Feeding and discharging equipment and track cleaning method thereof
CN105151723A (en) * 2015-07-09 2015-12-16 安庆市津海工业产品设计有限公司 Cleaning device for conveyor
CN105214983A (en) * 2015-09-15 2016-01-06 芜湖日升重型机床有限公司 A kind of numerical control machine belt intelligence system cleaning equipment
KR101894037B1 (en) * 2018-03-16 2018-09-04 에스제이이 주식회사 Conveyor belt cleaning device

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02198663A (en) * 1989-01-27 1990-08-07 Showa Alum Can Kk Coating drying and baking device
JPH07206137A (en) * 1994-01-26 1995-08-08 Bridgestone Corp Cleaning device of conveyor belt
JP2002292347A (en) * 2001-03-30 2002-10-08 Sumitomo Bakelite Co Ltd Method and apparatus for cleaning and drying optical plastic film
US8940100B2 (en) 2006-01-26 2015-01-27 Jfe Steel Corporation Method for cleaning hot dip galvanized steel sheet and cleaning apparatus therefor
WO2007086533A1 (en) * 2006-01-26 2007-08-02 Jfe Steel Corporation Method and apparatus for cleaning hot-dip galvanized steel sheet
JP2007197768A (en) * 2006-01-26 2007-08-09 Jfe Steel Kk Method and apparatus for cleaning hot dip galvanized steel sheet
KR100989265B1 (en) 2006-01-26 2010-10-20 제이에프이 스틸 가부시키가이샤 Method for cleaning hot dip galvanized steel sheet and cleaning apparatus therefor
CN101863374A (en) * 2010-06-11 2010-10-20 天津成科传动机电技术股份有限公司 Conveying belt cleaning maintainer and application method thereof
JP2012201438A (en) * 2011-03-24 2012-10-22 Misuzu Koki Kk Belt washing device
CN102991990A (en) * 2012-10-14 2013-03-27 昆山特力伯传动科技有限公司 Cleaning equipment of conveyer belt
CN103569635A (en) * 2013-11-19 2014-02-12 河南科隆集团有限公司 Washing and drying device of air-cushion belt conveyer
CN104003145A (en) * 2014-04-30 2014-08-27 楚天科技股份有限公司 Feeding and discharging equipment and track cleaning method thereof
CN105151723A (en) * 2015-07-09 2015-12-16 安庆市津海工业产品设计有限公司 Cleaning device for conveyor
CN105214983A (en) * 2015-09-15 2016-01-06 芜湖日升重型机床有限公司 A kind of numerical control machine belt intelligence system cleaning equipment
KR101894037B1 (en) * 2018-03-16 2018-09-04 에스제이이 주식회사 Conveyor belt cleaning device

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