JPS6273543U - - Google Patents
Info
- Publication number
- JPS6273543U JPS6273543U JP16392985U JP16392985U JPS6273543U JP S6273543 U JPS6273543 U JP S6273543U JP 16392985 U JP16392985 U JP 16392985U JP 16392985 U JP16392985 U JP 16392985U JP S6273543 U JPS6273543 U JP S6273543U
- Authority
- JP
- Japan
- Prior art keywords
- processing tank
- semiconductor wafers
- semiconductor wafer
- drain port
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000012535 impurity Substances 0.000 description 1
Landscapes
- Weting (AREA)
Description
第１図は本考案の半導体ウエハ用処理槽の正面
図、第２図は従来の半導体ウエハ用処理槽の正面
図、第３図は処理液を排液した場合における従来
の半導体ウエハ用処理槽正面図である。 １……半導体ウエハ用処理槽、２……半導体ウ
エハ用処理槽の槽底、３……半導体ウエハ用収納
治具支持板、４……排液口、５……半導体ウエハ
用収納治具、６……半導体ウエハ、７……残留不
純物。
図、第２図は従来の半導体ウエハ用処理槽の正面
図、第３図は処理液を排液した場合における従来
の半導体ウエハ用処理槽正面図である。 １……半導体ウエハ用処理槽、２……半導体ウ
エハ用処理槽の槽底、３……半導体ウエハ用収納
治具支持板、４……排液口、５……半導体ウエハ
用収納治具、６……半導体ウエハ、７……残留不
純物。
Claims (1)
- 半導体ウエハ用処理槽の槽底を、底面部の排液
口に向けて傾斜させたことを特徴とする半導体ウ
エハ用処理槽。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16392985U JPS6273543U (ja) | 1985-10-25 | 1985-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16392985U JPS6273543U (ja) | 1985-10-25 | 1985-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6273543U true JPS6273543U (ja) | 1987-05-11 |
Family
ID=31092581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16392985U Pending JPS6273543U (ja) | 1985-10-25 | 1985-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6273543U (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5057180A (ja) * | 1973-09-18 | 1975-05-19 | ||
| JPS5563829A (en) * | 1978-11-08 | 1980-05-14 | Nec Corp | Semiconductor etching device |
-
1985
- 1985-10-25 JP JP16392985U patent/JPS6273543U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5057180A (ja) * | 1973-09-18 | 1975-05-19 | ||
| JPS5563829A (en) * | 1978-11-08 | 1980-05-14 | Nec Corp | Semiconductor etching device |