JPS62163935U - - Google Patents
Info
- Publication number
- JPS62163935U JPS62163935U JP5240786U JP5240786U JPS62163935U JP S62163935 U JPS62163935 U JP S62163935U JP 5240786 U JP5240786 U JP 5240786U JP 5240786 U JP5240786 U JP 5240786U JP S62163935 U JPS62163935 U JP S62163935U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- processing tank
- wafer processing
- shaped groove
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000012535 impurity Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Description
第１図は本考案の半導体ウエハ用処理槽の正面
図、第２図は第１図の側面図、第３図は第１図の
斜視図、第４図、第５図は、従来の半導体ウエハ
用処理槽の正面図、第６図は第５図の側面図であ
る。 尚、図において、１……半導体ウエハ用処理槽
、２……半導体ウエハ用処理槽の底面、３……半
導体ウエハ用収納治具、４……不純物、５……半
導体ウエハ、６……Ｖ字型の溝形状の処理槽底面
。
図、第２図は第１図の側面図、第３図は第１図の
斜視図、第４図、第５図は、従来の半導体ウエハ
用処理槽の正面図、第６図は第５図の側面図であ
る。 尚、図において、１……半導体ウエハ用処理槽
、２……半導体ウエハ用処理槽の底面、３……半
導体ウエハ用収納治具、４……不純物、５……半
導体ウエハ、６……Ｖ字型の溝形状の処理槽底面
。
Claims (1)
- 半導体ウエハ用処理槽の底面部の表面がＶ字型
の溝の形状構造となつていることを特徴とする半
導体ウエハ用処理槽。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5240786U JPS62163935U (ja) | 1986-04-07 | 1986-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5240786U JPS62163935U (ja) | 1986-04-07 | 1986-04-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62163935U true JPS62163935U (ja) | 1987-10-17 |
Family
ID=30877550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5240786U Pending JPS62163935U (ja) | 1986-04-07 | 1986-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62163935U (ja) |
-
1986
- 1986-04-07 JP JP5240786U patent/JPS62163935U/ja active Pending