JPS6271510U - - Google Patents
Info
- Publication number
- JPS6271510U JPS6271510U JP16313485U JP16313485U JPS6271510U JP S6271510 U JPS6271510 U JP S6271510U JP 16313485 U JP16313485 U JP 16313485U JP 16313485 U JP16313485 U JP 16313485U JP S6271510 U JPS6271510 U JP S6271510U
- Authority
- JP
- Japan
- Prior art keywords
- dimension measuring
- measuring device
- optical dimension
- operating information
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 230000005856 abnormality Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985163134U JPH048325Y2 (tr) | 1985-10-24 | 1985-10-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985163134U JPH048325Y2 (tr) | 1985-10-24 | 1985-10-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6271510U true JPS6271510U (tr) | 1987-05-07 |
JPH048325Y2 JPH048325Y2 (tr) | 1992-03-03 |
Family
ID=31091050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985163134U Expired JPH048325Y2 (tr) | 1985-10-24 | 1985-10-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH048325Y2 (tr) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS587372U (ja) * | 1981-07-06 | 1983-01-18 | 沖電気工業株式会社 | 過電流保護回路付レ−ザダイオ−ド駆動回路 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS587372B2 (ja) * | 1978-12-28 | 1983-02-09 | 大信鋼業株式会社 | メタルラス製造装置 |
-
1985
- 1985-10-24 JP JP1985163134U patent/JPH048325Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS587372U (ja) * | 1981-07-06 | 1983-01-18 | 沖電気工業株式会社 | 過電流保護回路付レ−ザダイオ−ド駆動回路 |
Also Published As
Publication number | Publication date |
---|---|
JPH048325Y2 (tr) | 1992-03-03 |
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