JPS6269141A - Microhardness tester - Google Patents

Abstract

PURPOSE:To measure exactly hardness by a penetrating operation of once by constituting the titled tester so that a load applied to an indenter is varied gradually, and on the other hand, the depth of penetration in each load is detected, and correlation of the load and the depths of penetration is detected. CONSTITUTION:A sample S is placed on a sample base, and in a state that an indenter 8 is made to contact to the surface of the sample S, turning of a lever 6 is stopped, and a zero point is set. Subsequently, when a measurement is started, a control device 12 reads out a load data which is stored in a RAM 12a, and outputs it to a solenoid driving circuit 14. As a result, a current which coincides with a set load which is read out is supplied to a solenoid 9, and a set load DELTAP is applied to the indenter 8. The depth of penetration which is generated in this case is detected 11 and outputted to the device 12, and the device 12 smoothens the load value applied to the indenter 8 and the depth of penetration, and thereafter, outputs them to a recording device 15, and the depth of penetration in the load DELTAP is recorded. In such a way, a solenoid current is increased by DELTAI each, the set load is increased by DELTAP each, the depth of penetration of the indenter 8 in each load point is detected successively and recorded 15, an inclination of a curve is measured, and hardness of the sample is measured.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application In) The present invention relates to a microhardness meter suitable for measuring the Vickers hardness of thin film samples.

(Prior art) Insulation of metal evaporated films and semiconductor substrates! The hardness of a grade 2 thin film is determined by pressing an indenter made of a pyramid with a radius of curvature of about 120 nm at the tip into the thin film with a constant load of about 100 mg-wt.
This was done by measuring the depth of penetration into the thin film at this time.

In other words, JAPAN JOURNAL APPLIE
D As shown on page 758 of the November 1972 issue of PHYS+C9, the force (load W) in the direction of the monthly income on page 758 and L
A microhardness meter measures the penetration depth of the indenter tip by using a strain gauge to balance the force in the direction (resistance R from the sample).

Let Eo be the output of the strain gauge when no load is applied to the indenter (W=O), then let Eo be the output of the strain gauge when a predetermined load W is applied to the indenter, and then let Eo be the output of the strain gauge when no load is applied to the indenter (W=O).
When the indenter is fully lowered and penetrates into gap 1, the output of the strain gauge decreases to E=Ea, and the displacement depth of the indenter is measured at the other end of the gap. It is configured to the desired quality depending on the device.

However, since the load applied to the indenter is extremely small, only one load is required! Offset due to friction of J-mechanism, etc.
・Under the influence of For this reason, there is a desire to carry out measurements on a large number of FCs to obtain a uniform value of 1, and there is a problem in that it takes time to determine 411 for one sample 4.

(Purpose) The present invention has been made in view of the above problems, and its purpose is to provide a microhardness meter that can accurately measure hardness with a single pushing operation. be.

(Structure) In other words, 1. The present invention is characterized by, as shown in FIG. is controlled to continuously change the load on the indenter 3, and the amount of penetration of the indenter 3 into the sample S at this time is detected by the displacement detection means 4, while the current increment σ from the solenoid current control means 1 is Another feature is that the output from the displacement detecting means 4 is output to the load-cutting-in amount correlation detecting means 5 to detect the correlation between the load and the cutting-in amount.

Therefore, the details of the present invention will be explained below with reference to illustrated embodiments.

FIG. 2 shows an embodiment of the present invention, and the reference numeral 6 in FIG. 1 is a stacking rod whose center part is supported by a knife-f-shift, and a pyramid-shaped indenter 8 is attached to one end, and a pyramid-shaped indenter is attached to the other end. /id9
An iron core 10 is attached to generate an electromagnetic force in cooperation with the indenter 8, and a coil 11a and a core 11b, which move and constitute a displacement detector 11, are attached to the upper part of the indenter 8 and are attached to a base with a support. installed. Reference numeral 12 denotes a control device, which includes a RAM 12a that stores a load program for applying a load in predetermined steps, a ROM 12b that stores a program that performs control from the start of applying a load to data processing, and the ROMI 2. The CPU 12c is operated by a CPU 12c, which receives displacement signals from the displacement detector 11 via an analog-digital converter 13, and also inputs and outputs signals to and from a solenoid drive circuit 14, which will be described later, and controls load and biting μ. It is configured to output the load signal and displacement signal to a recording device 15 equipped with an X-Y recorder for detecting correlation. 14 is the aforementioned solenoid drive circuit, which includes a digital-to-analog converter 14a that converts the load signal output from the control device 12, and a voltage that converts the signal from the converter 14a into a current value and supplies it to the solenoid 9. - a current converter 14b and an analog-digital converter 14 that converts the current supplied to the solenoid 9 into a digital signal and outputs it to the control device 12;
It consists of a control device ′j! The solenoid is configured to supply a current consistent with the load signal from 112 to the solenoid.

In the figure, reference numeral 16 denotes a damper connected between the stacking rod 6 and the base, and 14d denotes a range driven by a signal from a load range selection switch (not shown) via a latch circuit 14e. , IJ switching circuits are shown, respectively.

Next, the operation of the apparatus configured as described above will be explained based on the flowchart shown in FIG.

When the sample S is placed on the sample stage and the start switch is pressed, a minute current is supplied to the solenoid 10, which rotates the stacking rod 6 and moves the indenter 8 toward the surface of the sample S. When the indenter 8 comes into contact with the sample surface due to this movement, a trigger-like signal P is output from the displacement detector 11 (Fig. 4).
The control device 12 detects this signal, maintains the current value supplied to the solenoid 9, stops the rotation of the stacking rod 6 with the indenter 8 in contact with the sample surface, and simultaneously detects the displacement. Clear the signal and load signal and set the zero point.

When such preliminary operations are completed, test conditions for maximum load capacity, load increase rate, and displacement range shade are set and a measurement start switch (not shown) is pressed, and the control device 12
The load data stored in the RAM 12a is read out and output to the solenoid drive circuit 14. This causes solenoid 9
A current corresponding to the read set load is supplied to the indenter 8, and the first stage set load ΔP is applied to the indenter 8. The indenter 8 receives this load ΔP and enters into the sample 1-1S with a biting amount corresponding to the hardness of the sample S. The biting that occurs at this time is detected by the displacement detector 11 and output to the control device 12. The control device 12 outputs the load value and the biting state applied to the indenter 8 to the recording device 15 after smoothing them.
Record the biting amount at load ΔP. When this recording reaches completion, the solenoid drive current is increased by ΔI to set the load to 2ΔP, and the amount of bite at the load of 2ΔP is recorded.

Note that even if an offset Q occurs due to friction etc. at the time of application of this initial load, the load will be lost! As the hill increases, the frictional force is overcome and the test load begins to be applied to the indenter.
Thereafter, as the load increases, the indenter 8 is displaced by a biting amount corresponding to the hardness of the sample.

Thereafter, in this manner, the indentation of the indenter 8 at each load point is sequentially detected and recorded by the recording device 15 while increasing the solenoid current by ΔI and increasing the set load by ΔP. As a result, a curve is drawn on the recording paper, as shown in FIG. 5, with the load on the horizontal axis and the cut-in amount on the vertical axis. Needless to say, the slope of the curve drawn on the recording paper has a correlation with the hardness of the sample, so the hardness of the sample can be determined by measuring the slope of the curve.

In this way, when the test load reaches the predetermined h amount large load 'L11 at L2, this load Φ is held for a predetermined time, the load is removed, and the biting H,5 is detected. Calculate the hardness and print it out.

In this embodiment, the correlation between the load and the biting depth is drawn on the recording paper, but Table 4:
Needless to say, it is possible to perform calculations using PU.

In addition, in the embodiment described in -, the point of contact between the pressure r- and sample #1 is detected by the bow from the displacement detector;
It is also possible to arrange a light-receiving element and a light-emitting element E with an indenter in between, and detect from the intensity of light upon contact.

(Effect) As explained above, according to the invention, the pressure f is +J″j
11- is detected at each load, and the correlation between the load/hill and the biting Fd is detected. ;-The hardness of the sample can be accurately measured with a single pushing operation, regardless of the size. In addition, since accurate data can be obtained by measuring at one location, not only can the time required for preliminary operations such as setting the indenter on the sample surface be significantly reduced, but also the load can be applied at the same measurement point. Since the measurement is performed by changing the hardness, it is possible to measure the hardness distribution in the depth direction.

[Brief explanation of drawings]

Fig. 1 is a block diagram clearly showing the configuration of the present invention, Fig. 2 is a block diagram showing an embodiment of the invention, Fig. 3 is a flowchart showing the operation of the same device, and Fig. 4 is a block diagram showing the operation of the same device. A waveform diagram and No. 51-4 are characteristic diagrams showing the output of the same device. 6...Stacking rod 8...Indenter 9...Solenoid 11...Displacement detector 12...Control device 14...Solenoid drive circuit 15...Recording device application Person RIKEN (and 1 other person) Agent Patent attorney Keiji Kawa Katsuhiko Kimura Figure 1 Figure 2

Claims (1)

[Claims] a solenoid current control means that includes an indenter receiving a load from the electromagnetic force generation means and a displacement detection means for detecting displacement of the indenter, and outputs a current that changes in predetermined increments to the electromagnetic force generation means; A microhardness meter comprising a correlation detection means for detecting the output from the displacement detection means for each increment and outputting a correlation between the load and the biting amount.