JPS63241444A - Testing method for indentation hardness - Google Patents
Testing method for indentation hardnessInfo
- Publication number
- JPS63241444A JPS63241444A JP7815587A JP7815587A JPS63241444A JP S63241444 A JPS63241444 A JP S63241444A JP 7815587 A JP7815587 A JP 7815587A JP 7815587 A JP7815587 A JP 7815587A JP S63241444 A JPS63241444 A JP S63241444A
- Authority
- JP
- Japan
- Prior art keywords
- depth
- hardness
- indentation
- sample
- load
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007373 indentation Methods 0.000 title claims abstract description 37
- 238000012360 testing method Methods 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 claims description 9
- 238000007541 indentation hardness test Methods 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 abstract description 2
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000007542 hardness measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、圧子に試験荷重を負荷し、その時の圧子・の
試料表面への押込深さから試料の硬さを求める押込硬さ
試験方法に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention is an indentation hardness test method in which a test load is applied to an indenter and the hardness of the sample is determined from the depth of indentation of the indenter into the sample surface at that time. Regarding.
［従来の技術］
従来の押込硬さ試験方法は、あらかしめ設定されている
荷重を圧ｆに負荷して試料表面に押し込み、その時の押
込深さを求めて試料硬度を算出している。[Prior Art] In the conventional indentation hardness test method, a predetermined load is applied to a pressure f, the sample is pushed into the surface of the sample, and the indentation depth at that time is determined to calculate the sample hardness.
［発明が解決しようとする問題点］
従来の試験方法のように一定荷重における圧子の押込深
さを求める場合は、試料の硬度によって押込深さが変化
する。例えば第２図の特性図に示すように、試料Ａは荷
重Ｐ２で押込深さがり３、試料Ｂは同じ荷重Ｐ２で押込
深さがＤ２となることを示す。この押込深さが試料によ
って異なる様ｒ・を第３図（ａ） 、 （ｂ）に示すが
、試料へ及びＢの膜厚が同じ厚さｈの場合、同図（ｂ）
に示すようにＤ２／ｈが１に近いため試料Ｂの測定にお
いては基盤Ｅの影響を大きく受けることになる。特に薄
膜試料の場合には、膜Ｊｊ、Ｉに対する押込深さの割合
が変化し、この基盤Ｅの影響が無視できないほど大きく
なるので、試料の硬度比較を正確に行なえないという問
題を生じていた。[Problems to be Solved by the Invention] When determining the indentation depth of an indenter under a constant load as in the conventional test method, the indentation depth changes depending on the hardness of the sample. For example, as shown in the characteristic diagram of FIG. 2, sample A exhibits an indentation depth of 3 at a load of P2, and sample B exhibits an indentation depth of D2 at the same load P2. Figures 3(a) and 3(b) show how this indentation depth differs depending on the sample, but when the film thicknesses on the sample and B are the same thickness h, the same figure (b)
As shown in , since D2/h is close to 1, the measurement of sample B is greatly influenced by the substrate E. Particularly in the case of thin film samples, the ratio of the indentation depth to the films Jj and I changes, and the influence of this base E becomes so large that it cannot be ignored, creating the problem that it is not possible to accurately compare the hardness of the samples. .
そこで本発明は、薄ｌｌＩ２試料等の硬度を測定し硬度
比較を行なうについて、正確な評価等を行なうことがで
きる押込硬さ試験方法を提供することを目的とする。Therefore, an object of the present invention is to provide an indentation hardness testing method that can perform accurate evaluation when measuring the hardness of thin llI2 samples and performing hardness comparisons.
［問題点を解決するための手段］
本発明は上記問題点を解決するために、次のような構成
を採用した。[Means for Solving the Problems] In order to solve the above problems, the present invention employs the following configuration.
すなわち、本発明にかかる押込硬さ試験方法は、圧子に
加えられる試験荷重と、該試験荷重によって試料表面に
押込まれる圧子の押込み深さとから試料の硬度を求める
押込硬さ試験方法において、圧ｒの試料表面からの押込
深さはあらかじめ設定しておき、圧子が設定押込深さに
到達した時に圧子に加えられている試験荷重を測定し、
この測定された試験荷重とあらかじめ設定された押込深
さとから試料の硬度を求めることを特徴と１−る。That is, the indentation hardness testing method according to the present invention is an indentation hardness testing method that calculates the hardness of a sample from the test load applied to the indenter and the indentation depth of the indenter pushed into the sample surface by the test load. The indentation depth r from the sample surface is set in advance, and the test load applied to the indenter is measured when the indenter reaches the set indentation depth.
The method is characterized in that the hardness of the sample is determined from the measured test load and the preset indentation depth.
［作 用コ
試料を載置した基盤の影響が少ない深さとしてあらかじ
め押込深さが設定されており、圧子がこの設定押込深さ
に到達した時点の試験荷重を測定して硬度を求めるので
、例えば薄膜試料の膜厚に対する押込深さの比が一＝定
になり、試料の硬度比較を正確に行なうことができる。[Operation] The indentation depth is set in advance as a depth that is less affected by the base on which the sample is placed, and the hardness is determined by measuring the test load when the indenter reaches this set indentation depth. For example, the ratio of the indentation depth to the film thickness of the thin film sample becomes constant, making it possible to accurately compare the hardness of the samples.
［実施例］
本発明に係る試験方法は、例えば第３図（ａ）に示すよ
うに基盤Ｅの影響が少ない押込深さＤｌをあらかじめ設
定押込深さとして設定しておき、次いで電子天秤等の負
荷手段によって圧子に荷重を加え、順次荷重を増加させ
ていく。圧ｒが試料に接触した時点からの圧その変位を
検出し、該変位が設定押込深さに到達した時点の試験荷
重を測定する。この場合、設定押込深さ到達後荷重の保
持時間を設定すると、変位の増加を生しる場合が多いの
で、押込深さが設定値になった瞬間の荷重を測定して動
的硬度とする。[Example] In the test method according to the present invention, for example, as shown in FIG. A load is applied to the indenter using a loading means, and the load is gradually increased. The displacement of the pressure from the time when the pressure r contacts the sample is detected, and the test load is measured when the displacement reaches the set indentation depth. In this case, setting the time to hold the load after reaching the set indentation depth often causes an increase in displacement, so measure the load at the moment the indentation depth reaches the set value and use it as dynamic hardness. .
測定された荷重をＰ、設定押込深さをＤ、圧ｒ形状によ
る係数をにとすれば、硬度Ｈは、Ｈ＝Ｋ −Ｐ／Ｄ２と
して算出される。If the measured load is P, the set indentation depth is D, and the coefficient due to the shape of the pressure r is , then the hardness H is calculated as H=K - P/D2.
荷重負荷後の圧子の変位増加を考慮してより正確な測定
を行なうには、第１図に示すように設定押込深さり、に
到達する前の深さり。の時点から荷１Ｒ増加速度を減少
させるようにし、Ｄｌに到達する時間ｔ２とり。に到達
する時間ｔ、に対しｔ２−ｔ、” ｔ３の間に押込深さ
がＤｌになる様に荷重を増加させていき、ｔ３時間・経
過時点の押込深さと荷重を測定すればよい。すなわち、
Ｄ。For more accurate measurements, taking into account the increase in displacement of the indenter after loading, the depth before reaching the set indentation depth, as shown in Figure 1. The rate of increase in load 1R is decreased from the point in time, and the time t2 is set to reach Dl. The load is increased so that the indentation depth becomes Dl during the period t2-t, t3, and the indentation depth and load are measured at the elapsed time point of t3. ,
D.
とり。／ＤＩ とｔ３を設定して試験を行なう。bird. /DI and t3 to perform the test.
上記したように、本発明においては試料に加える変形（
押込深さ）が等しくなるように荷重を加え、該荷重の相
違によって硬度を比較するので、試料を載置した基盤の
影響を等しくすることができ、正確に硬度比較を行なう
ことができる。As mentioned above, in the present invention, the deformation (
Loads are applied so that the indentation depths are the same, and the hardness is compared based on the difference in load, so the influence of the base on which the sample is placed can be equalized, and hardness comparisons can be performed accurately.
［発明の効果コ
上記説明から明らかなように、本発明にかかる押込硬さ
試験方法によれば、試料を載置した基盤からの影響を等
しくして試料の硬度測定を行なうことができるようにな
った。特に薄膜試料の場合でも硬度比較を正確に行なう
ことができるようになった。[Effects of the Invention] As is clear from the above explanation, according to the indentation hardness testing method according to the present invention, the hardness of the sample can be measured by equalizing the influence from the base on which the sample is placed. became. In particular, it has become possible to accurately compare hardness even in the case of thin film samples.
第１図は、本発明の実施例において圧子変位の増加を考
慮して試験を行なう場合の設定要素を説明する図、第２
図および第３図（ａ） 、 （ｂ）は従来法を説明する
図である。FIG. 1 is a diagram illustrating setting elements when conducting a test in consideration of an increase in indenter displacement in an embodiment of the present invention, and FIG.
The figure and FIGS. 3(a) and 3(b) are diagrams explaining the conventional method.
Claims (1)
て試料表面に押込まれる圧子の押込み深さとから試料の
硬度を求める押込硬さ試験方法において、圧子の試料表
面からの押込深さはあらかじめ設定しておき、圧子が設
定押込深さに到達した時に圧子に加えられている試験荷
重を測定し、この測定された試験荷重とあらかじめ設定
された押込深さとから試料の硬度を求めることを特徴と
する押込硬さ試験方法。(1) In the indentation hardness test method, which determines the hardness of a sample from the test load applied to the indenter and the indentation depth of the indenter into the sample surface due to the test load, the indentation depth from the sample surface is determined in advance. The test load applied to the indenter is measured when the indenter reaches the set indentation depth, and the hardness of the sample is determined from the measured test load and the preset indentation depth. Indentation hardness test method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62078155A JPH07104245B2 (en) | 1987-03-30 | 1987-03-30 | Indentation hardness test method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62078155A JPH07104245B2 (en) | 1987-03-30 | 1987-03-30 | Indentation hardness test method |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8288630A Division JP3014087B2 (en) | 1996-10-30 | 1996-10-30 | Indentation hardness tester |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63241444A true JPS63241444A (en) | 1988-10-06 |
| JPH07104245B2 JPH07104245B2 (en) | 1995-11-13 |
Family
ID=13654025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62078155A Expired - Lifetime JPH07104245B2 (en) | 1987-03-30 | 1987-03-30 | Indentation hardness test method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07104245B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007049839A1 (en) * | 2005-10-27 | 2007-05-03 | Korea Research Institute Of Standards And Science | A multi-functional calibration device for brinell hardness tester and a calibration method by the said device |
| JP2008180669A (en) * | 2007-01-26 | 2008-08-07 | Mitsutoyo Corp | Hardness testing machine |
| JP2009204574A (en) * | 2008-02-29 | 2009-09-10 | Citizen Holdings Co Ltd | Hardness meter |
| CN104101551A (en) * | 2014-07-22 | 2014-10-15 | 中国人民解放军装甲兵工程学院 | Material Vickers hardness determining method based on instrumented indentation of Berkovich and nominal hardness hardness |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3195590B2 (en) | 1999-04-27 | 2001-08-06 | 日東電工株式会社 | Flexible wiring board |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5879249U (en) * | 1981-11-24 | 1983-05-28 | セイコーエプソン株式会社 | Variable load hardness tester |
-
1987
- 1987-03-30 JP JP62078155A patent/JPH07104245B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5879249U (en) * | 1981-11-24 | 1983-05-28 | セイコーエプソン株式会社 | Variable load hardness tester |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007049839A1 (en) * | 2005-10-27 | 2007-05-03 | Korea Research Institute Of Standards And Science | A multi-functional calibration device for brinell hardness tester and a calibration method by the said device |
| JP2008180669A (en) * | 2007-01-26 | 2008-08-07 | Mitsutoyo Corp | Hardness testing machine |
| JP2009204574A (en) * | 2008-02-29 | 2009-09-10 | Citizen Holdings Co Ltd | Hardness meter |
| CN104101551A (en) * | 2014-07-22 | 2014-10-15 | 中国人民解放军装甲兵工程学院 | Material Vickers hardness determining method based on instrumented indentation of Berkovich and nominal hardness hardness |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07104245B2 (en) | 1995-11-13 |
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