JPS6265985A

JPS6265985A - セラミツクス用電接装置

セラミツクス用電接装置

Info

Publication number: JPS6265985A
Authority: JP; Japan
Prior art keywords: ceramics; adhesive; bonding; output current; conductivity
Prior art date: 1985-09-17
Legal status : Granted

Application number

JP20586585A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0424311B2 (enExample

Inventor

江畑　儀弘

正憲香山

玉利　信幸

木下　実

西　徳三

Current Assignee

Daihen Corp

National Institute of Advanced Industrial Science and Technology AIST

Original Assignee

Agency of Industrial Science and Technology

Daihen Corp

Priority date

1985-09-17

Filing date

1985-09-17

Publication date

1987-03-25

1985-09-17 Application filed by Agency of Industrial Science and Technology, Daihen Corp filed Critical Agency of Industrial Science and Technology

1985-09-17 Priority to JP20586585A priority Critical patent/JPS6265985A/ja

1986-08-27 Priority to US06/900,778 priority patent/US4724020A/en

1986-09-16 Priority to CA000518306A priority patent/CA1256511A/en

1986-09-17 Priority to DE8686112827T priority patent/DE3667781D1/de

1986-09-17 Priority to EP86112827A priority patent/EP0218943B1/en

1987-03-25 Publication of JPS6265985A publication Critical patent/JPS6265985A/ja

1992-04-24 Publication of JPH0424311B2 publication Critical patent/JPH0424311B2/ja

Status Granted legal-status Critical Current

Links

239000000919 ceramic Substances 0.000 title claims description 71
239000000853 adhesive Substances 0.000 claims description 45
230000001070 adhesive effect Effects 0.000 claims description 45
239000007789 gas Substances 0.000 description 23
238000000034 method Methods 0.000 description 23
238000010438 heat treatment Methods 0.000 description 13
ZPUCINDJVBIVPJ-LJISPDSOSA-N cocaine Chemical compound O([C@H]1C[C@@H]2CC[C@@H](N2C)[C@H]1C(=O)OC)C(=O)C1=CC=CC=C1 ZPUCINDJVBIVPJ-LJISPDSOSA-N 0.000 description 6
NFYLSJDPENHSBT-UHFFFAOYSA-N chromium(3+);lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Cr+3].[La+3] NFYLSJDPENHSBT-UHFFFAOYSA-N 0.000 description 5
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
241000533950 Leucojum Species 0.000 description 4
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
229910052802 copper Inorganic materials 0.000 description 4
239000010949 copper Substances 0.000 description 4
239000011521 glass Substances 0.000 description 4
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
238000007664 blowing Methods 0.000 description 3
229910010293 ceramic material Inorganic materials 0.000 description 3
230000005611 electricity Effects 0.000 description 3
229910052750 molybdenum Inorganic materials 0.000 description 3
239000011733 molybdenum Substances 0.000 description 3
239000005995 Aluminium silicate Substances 0.000 description 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
235000012211 aluminium silicate Nutrition 0.000 description 2
WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 2
229910001634 calcium fluoride Inorganic materials 0.000 description 2
229910052799 carbon Inorganic materials 0.000 description 2
239000003795 chemical substances by application Substances 0.000 description 2
239000004020 conductor Substances 0.000 description 2
229910052878 cordierite Inorganic materials 0.000 description 2
JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 2
229910052738 indium Inorganic materials 0.000 description 2
APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 2
WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 2
239000000155 melt Substances 0.000 description 2
238000004021 metal welding Methods 0.000 description 2
229910052759 nickel Inorganic materials 0.000 description 2
229910052761 rare earth metal Inorganic materials 0.000 description 2
239000004065 semiconductor Substances 0.000 description 2
PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 2
229910052718 tin Inorganic materials 0.000 description 2
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
229910052721 tungsten Inorganic materials 0.000 description 2
239000010937 tungsten Substances 0.000 description 2
238000004804 winding Methods 0.000 description 2
229910052725 zinc Inorganic materials 0.000 description 2
239000011701 zinc Substances 0.000 description 2
229910001369 Brass Inorganic materials 0.000 description 1
MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
241000196324 Embryophyta Species 0.000 description 1
KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
229910052689 Holmium Inorganic materials 0.000 description 1
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
241001609370 Puschkinia scilloides Species 0.000 description 1
229910052581 Si3N4 Inorganic materials 0.000 description 1
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
238000004026 adhesive bonding Methods 0.000 description 1
239000010951 brass Substances 0.000 description 1
150000001805 chlorine compounds Chemical class 0.000 description 1
239000000567 combustion gas Substances 0.000 description 1
238000010276 construction Methods 0.000 description 1
230000007423 decrease Effects 0.000 description 1
238000010586 diagram Methods 0.000 description 1
229910001882 dioxygen Inorganic materials 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000010894 electron beam technology Methods 0.000 description 1
150000004673 fluoride salts Chemical class 0.000 description 1
-1 for example Substances 0.000 description 1
239000003779 heat-resistant material Substances 0.000 description 1
KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 description 1
239000001257 hydrogen Substances 0.000 description 1
229910052739 hydrogen Inorganic materials 0.000 description 1
230000006698 induction Effects 0.000 description 1
238000009434 installation Methods 0.000 description 1
229910052742 iron Inorganic materials 0.000 description 1
229910052746 lanthanum Inorganic materials 0.000 description 1
FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
239000000463 material Substances 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
229910044991 metal oxide Inorganic materials 0.000 description 1
150000004706 metal oxides Chemical class 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
239000011225 non-oxide ceramic Substances 0.000 description 1
239000003921 oil Substances 0.000 description 1
238000013001 point bending Methods 0.000 description 1
239000001294 propane Substances 0.000 description 1
230000004043 responsiveness Effects 0.000 description 1
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
229910052709 silver Inorganic materials 0.000 description 1
239000004332 silver Substances 0.000 description 1
235000013024 sodium fluoride Nutrition 0.000 description 1
239000011775 sodium fluoride Substances 0.000 description 1
238000005476 soldering Methods 0.000 description 1
239000000126 substance Substances 0.000 description 1
150000004763 sulfides Chemical class 0.000 description 1
239000011135 tin Substances 0.000 description 1
XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
229910001887 tin oxide Inorganic materials 0.000 description 1
229910052720 vanadium Inorganic materials 0.000 description 1
LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
238000003466 welding Methods 0.000 description 1
238000005493 welding type Methods 0.000 description 1
229910052727 yttrium Inorganic materials 0.000 description 1
VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1