JPS626301B2 - - Google Patents

Info

Publication number
JPS626301B2
JPS626301B2 JP54083580A JP8358079A JPS626301B2 JP S626301 B2 JPS626301 B2 JP S626301B2 JP 54083580 A JP54083580 A JP 54083580A JP 8358079 A JP8358079 A JP 8358079A JP S626301 B2 JPS626301 B2 JP S626301B2
Authority
JP
Japan
Prior art keywords
silicon substrate
platen
shaped
chevron
lock chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54083580A
Other languages
English (en)
Japanese (ja)
Other versions
JPS567428A (en
Inventor
Toshio Matsuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP8358079A priority Critical patent/JPS567428A/ja
Publication of JPS567428A publication Critical patent/JPS567428A/ja
Publication of JPS626301B2 publication Critical patent/JPS626301B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P30/20—

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Discharge By Other Means (AREA)
JP8358079A 1979-07-02 1979-07-02 Holding mechanism for silicon substrate Granted JPS567428A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8358079A JPS567428A (en) 1979-07-02 1979-07-02 Holding mechanism for silicon substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8358079A JPS567428A (en) 1979-07-02 1979-07-02 Holding mechanism for silicon substrate

Publications (2)

Publication Number Publication Date
JPS567428A JPS567428A (en) 1981-01-26
JPS626301B2 true JPS626301B2 (OSRAM) 1987-02-10

Family

ID=13806426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8358079A Granted JPS567428A (en) 1979-07-02 1979-07-02 Holding mechanism for silicon substrate

Country Status (1)

Country Link
JP (1) JPS567428A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60133628U (ja) * 1984-02-14 1985-09-06 関西日本電気株式会社 イオン注入装置

Also Published As

Publication number Publication date
JPS567428A (en) 1981-01-26

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