JPS6262954U - - Google Patents
Info
- Publication number
- JPS6262954U JPS6262954U JP15362885U JP15362885U JPS6262954U JP S6262954 U JPS6262954 U JP S6262954U JP 15362885 U JP15362885 U JP 15362885U JP 15362885 U JP15362885 U JP 15362885U JP S6262954 U JPS6262954 U JP S6262954U
- Authority
- JP
- Japan
- Prior art keywords
- titanium oxide
- pair
- oxygen sensor
- substrate
- embedding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 3
- 229910052760 oxygen Inorganic materials 0.000 claims 3
- 239000001301 oxygen Substances 0.000 claims 3
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１図は本考案の実施例を示す上面図、第１
図は第１図の―断面図、第２図は従来
例を示す断面図（第２図の―断面図）、第
２図は同上従来例を示す平面図である。 １０，１５……基板、１１，１２……印刷電極
、１３，１４……電極線、１６……酸化チタン。
図は第１図の―断面図、第２図は従来
例を示す断面図（第２図の―断面図）、第
２図は同上従来例を示す平面図である。 １０，１５……基板、１１，１２……印刷電極
、１３，１４……電極線、１６……酸化チタン。
Claims (1)
- 一対の電極間に介在される酸化チタンの電気抵
抗変化によつて酸素濃度を検出するようにした酸
素センサにおいて、基板の一側に積層させた酸化
チタン層に一対の電極線を埋設させて構成したこ
とを特徴とする酸素センサ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15362885U JPS6262954U (ja) | 1985-10-09 | 1985-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15362885U JPS6262954U (ja) | 1985-10-09 | 1985-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6262954U true JPS6262954U (ja) | 1987-04-18 |
Family
ID=31072673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15362885U Pending JPS6262954U (ja) | 1985-10-09 | 1985-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6262954U (ja) |
-
1985
- 1985-10-09 JP JP15362885U patent/JPS6262954U/ja active Pending